ISSN:
1349-9432
Keywords:
zone-plate interferometer
;
shape measurement of mirror
;
on-machine measurement
;
computer generated hologram
;
large numerical aperture
;
aspherical mirror
Source:
Springer Online Journal Archives 1860-2000
Topics:
Physics
Notes:
Abstract A compact zone-plate interferometer is developed to measure the shape error of concave mirrors. A diffracted light of (0, 0) and that of (-1, -1) or (+1, +1) are used in the interferometer. The interferometer enables us to measure the shape error of mirrors with a large numerical aperture and a steep asphericity. The shape errors of a spherical mirror and a parabolic mirror are measured by the interferometer, and that of the former agrees well with that measured by Fizeau interferometer. Methods for adjustments of zone plates and the mirrors being tested are proposed to perform precise measurements of the mirror shapes.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s10043-996-0034-5
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