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  • 1
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 71 (2000), S. 943-945 
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Multicusp volume ion sources with radio frequency (rf) antenna are well accepted negative ion sources except for the contamination problem from the rf antenna immersed in the plasma. The transformer coupled plasma (TCP) developed as high-density plasma sources for processing of microelectronics is newly recognized as a good candidate for negative ion sources without this contamination problem. High-density plasmas can be generated with the rf antenna outside of the plasma chamber separated by a dielectric window. Also, this high-density, high-temperature, heating region can be well separated from the negative ion extraction region where low electron temperatures are required. Moreover, TCP does not require a magnetic field for plasma generations; electron filtering with transverse magnetic field is compatible. Feasibility of the TCP negative ion source has been confirmed with plasma characteristics. Conceptual design of a new novel ion source based on the TCP source is performed. © 2000 American Institute of Physics.
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  • 2
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 74 (1993), S. 1456-1458 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A material for thermally stable self-aligned silicide technologies has been developed using sequentially deposited Ti/Ta on polycrystalline silicon. At lower annealing temperatures below 1000 °C two separate phases were found by cross-sectional transmission electron microscopy to exist in the form of bilayer TiSi2/TaSi2. The formation of a ternary phase (TiTa)Si2 has been observed at a higher temperature of 1000 °C. Consequently, the ternary (TiTa)Si2 layer could be kept extremely flat, with a sheet resistance of 5 Ω/(D'Alembertian), even after 1000 °C, 30 min annealing. Cross-sectional transmission electron micrographs of the structure clearly reveal that no agglomeration occurs during the heat treatment.
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  • 3
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 72 (1992), S. 297-299 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The formation of titanium silicides on Si implanted with different BF2+ dosages has been studied by secondary ion mass spectrometry and transmission electron microscopy measurements. The thickness of the silicide layer formed in the temperature ranging from 600 to 800 °C has been investigated as a function of the implanted BF2+ dosage up to 1×1016 cm−2. Annealing at 700 °C results in conversion of the titanium film into predominantly C49 TiSi2, and most of it is transformed into the C54 phase at 800 °C or higher, resulting in a lower sheet resistance (16 μΩ cm). The titanium silicide thickness formed after the rapid thermal annealing (RTA) treatment depends on the implanted BF2+ dosage, caused by the native oxide enhanced by increased damage. Boron is redistributed into the silicide layer up to the solid solubility limit during annealing, leading to an accumulation at the silicide/silicon interface. The lowest contact resistance (with a size of 0.7 μm×0.7 μm) of 35 Ω is obtained at the annealing temperature of 700 °C.
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  • 4
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Physics of Plasmas 5 (1998), S. 966-972 
    ISSN: 1089-7674
    Source: AIP Digital Archive
    Topics: Physics
    Notes: In search of a method to generate a radial electric field in tokamak plasmas, an experimental study has been performed to investigate the possibility of inducing radial electrical current. An external coil array has been used to create a local magnetic ripple well and the electron cyclotron resonance heating (ECH) has been used to trap some electrons that will then be subject to rapid vertical drifts into the plasma. Using a simplified experimental arrangement with only a toroidal magnetic field, an ECH-driven radial electrical current has been observed. The ECH-driven elecron temperature anisotropy, which is necessary for ripple trapping and electron drifts, has been determined by several different methods. The perpendicular temperature can be shown to be as large as 11 times the parallel temperature, which should yield a significant amount of ripple trapping and radial current. © 1998 American Institute of Physics.
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  • 5
    ISSN: 1089-7674
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A noninductive current drive concept, based on internal pressure-driven currents in a low-aspect-ratio toroidal geometry, has been demonstrated on the Current Drive Experiment Upgrade (CDX-U) [Forest et al., Phys. Rev. Lett. 68, 3559 (1992)] and further tested on DIII-D [in Plasma Physics and Controlled Nuclear Fusion Research, 1986, Proceedings of the 11th International Conference, Kyoto (International Atomic Energy Agency, Vienna, 1987), Vol. 1, p. 159]. For both experiments, electron cyclotron power provided the necessary heating to breakdown and maintain a plasma with high-βp and low collisionality (εβp∼1, ν*≤1). A poloidal vacuum field similar to a simple magnetic mirror is superimposed on a much stronger toroidal field to provide the initial confinement for a hot, trapped electron species. With application of electron cyclotron heating (ECH), toroidal currents spontaneously flow within the plasma and increase with applied ECH power. The direction of the generated current is independent of the toroidal field direction and depends only on the direction of the poloidal field, scaling inversely with magnitude of the later. On both CDX-U and DIII-D, these currents were large enough that stationary closed flux surfaces were observed to form with no additional Ohmic heating. The existence of such equilibria provides further evidence for the existence of some type of bootstrap current. Equilibrium reconstructions show the resulting plasma exhibits properties similar to more conventional tokamaks, including a peaked current density profile which implies some form of current on axis or nonclassical current transport.
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  • 6
    Electronic Resource
    Electronic Resource
    New York, NY : American Institute of Physics (AIP)
    Physics of Fluids 2 (1990), S. 1415-1420 
    ISSN: 1089-7666
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Several dc helicity injection experiments using an electron beam technique have been conducted on the Current Drive Experiment (CDX) [Phys. Rev. Lett. 59, 2165 (1987)] and the Continuous Current Tokamak (CCT) [Phys. Rev. Lett. 63, 2365 (1989)]. The data strongly suggest that tokamak plasmas are being formed and maintained by this method. The largest currents driven to date are 1 kA in CDX (qa =5) and 6 kA in CCT (qa =3.5). An initial comparison of discharge properties with helicity theory indicates rough agreement. Current drive energy efficiencies are 9% and 23% of Ohmic efficiency in two cases analyzed. Strong radial electric fields are observed in these plasmas that cause poloidal rotation and, possibly, improved confinement.
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  • 7
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 68 (1997), S. 1059-1062 
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Electron density and temperature in the CDX-U low aspect ratio tokamak are too low to allow observation of fast magnetohydrodynamic activity using soft x-ray continuum emission. However, spectroscopic measurements show that extreme ultraviolet (XUV) line emission of intrinsic impurities is bright enough to observe such activity. In addition, a fast monitoring system for local temperature changes in the plasma core is required for planned auxiliary heating experiments. We present a spectrally resolved tomographic system for fast imaging of O VI 2s–np, 2p–nd (n≥3), C V 1s2–1s2p and C VI 1s–2p XUV transitions. Using this emission, we can study both core and edge MHD activity, while the C VI to C V intensity ratio can indicate local changes in electron temperature. To achieve maximal throughput together with the needed spectral resolution, we use arrays of surface barrier diodes filtered with bandpass elemental filters. Using M edge filters (Zr, Pd, and Ag), we achieve both good discrimination between the above charge states and large transmission at the wavelengths of interest. Preliminary results obtained from CDX-U are presented. © 1997 American Institute of Physics.
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  • 8
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 66 (1995), S. 379-381 
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: An existing microwave interferometer system is modified to add the capability of polarimetry in the CDX-U tokamak. Though this interferometer system can scan vertically and radially, only the vertical view channel is modified to accomodate Faraday rotation measurements, with its radial scanning capability preserved. For our relatively long microwave wavelength, the signal amplitude variation due to refraction is more important than effects due to vibration. An amplitude independent design of Faraday rotation diagnostics has been developed. By using a linearly polarized beam as input and putting a rotating polarizer in the beam after the plasma, birefringency effects are minimized. A digital phase detection technique has been developed for better resolution of the Faraday rotation angle. © 1995 American Institute of Physics.
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  • 9
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 69 (1998), S. 1344-1348 
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Characteristics of helicon plasmas are examined as a candidate for accelerator ion sources. Helicon plasmas have much higher density with very high power efficiency in a relatively lower magnetic field than electron cyclotron resonance plasmas do. High electron density and high electron temperature are beneficial to extract high ion current density. Low magnetic field favors for low-emittance accelerators. Taking advantage of placing antenna outside of the plasma chamber, source contamination can be kept low enough to maintain a stable operation for longer periods. Based on these characteristics, new designs of high current ion sources using helicon waves are proposed for accelerator applications for the first time. © 1998 American Institute of Physics.
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  • 10
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 68 (1997), S. 1055-1058 
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Due to their highly shaped plasma and possible poloidal asymmetry in impurity concentration, spherical Tokamaks will require tomographic reconstruction of local emissivities to assess impurity content and transport. To collect in an effective manner the data required for such reconstruction, we develop arrays of high throughput "mini-monochromators" using extreme ultraviolet multilayer mirrors as dispersive elements and filtered surface barrier diodes as detectors. We discuss monochromator optimization and show that by working at near normal incidence throughput and spectral resolution are simultaneously maximized. A system proposed for tomographic reconstruction of C V and C VI resonance emission at 33.7 and 40.5 Å respectively, achieves 0.9 Å spectral resolution, 2 cm spatial resolution, and 0.2 ms temporal resolution, together with good sensitivity and background rejection. Preliminary results obtained from CDX-U low aspect ratio tokamak are also presented. © 1997 American Institute of Physics.
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