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  • 1
    Electronic Resource
    Electronic Resource
    Springer
    Microsystem technologies 5 (1998), S. 93-99 
    ISSN: 1432-1858
    Source: Springer Online Journal Archives 1860-2000
    Topics: Electrical Engineering, Measurement and Control Technology , Technology
    Notes: Abstract  A three-electrode capacitive pressure sensor for touch-mode operation with sensitivity of 0.030 pF/kPa (or 10.4 mV/kPa using CP-10 C/V converter circuit) in the pressure range of 170–280 kPa is presented with theoretical explanation of experimental results. A special ring structure is designed to integrate a sensing capacitor and a reference capacitor into the same cavity to partially cancel out the temperature effect. A third electrode is included to eliminate two-level connections without reducing its pressure sensitivity. The sensor offers the advantages of simple fabrication processes, planar connections, as well as high sensitivity, near-linear output, and large over-range pressure.
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    Springer
    Microsystem technologies 4 (1998), S. 82-85 
    ISSN: 1432-1858
    Source: Springer Online Journal Archives 1860-2000
    Topics: Electrical Engineering, Measurement and Control Technology , Technology
    Notes: Abstract  A analytical dosage model was established to study exposure parameters of deep x-ray lithography systematically. It provided a reasonable guild line for deciding exposure parameters, selecting masks and filters in radiating process. Calculated results showed a good agreement with experiment results. Both of the single and multiple exposure processes were investigated in present study.
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    Springer
    Computational mechanics 3 (1988), S. 167-177 
    ISSN: 1432-0924
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: Abstract A theoretical analysis of two-dimensional heat transfer in inclined rectangular cells with the effect of lateral walls is studied. The lower and upper plates are heated and cooled, respectively, to maintain constant surface temperatures. Heat conduction along the lateral walls and radiation among cell surfaces are also considered. An iterative finite-difference scheme is employed to solve the governing equations in the flow field and the temperature distribution involving the radiative, conductive and conductive heat transfer on the lateral walls. The parameters studied are a Parndtl number (Pr) of 0.7, a Stark number (S) of 0.25, aspect ratios (b) between 0.25 and 2.0, conduction ratios (C) between 0.015 and 143, angles of inclination (ϕ) between 10° and 35°, and Rayleigh numbers (Ra) up to 105. Comparisons with experimental data for the case of adiabatic walls have been made with satisfactory agreement.
    Type of Medium: Electronic Resource
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  • 4
    Electronic Resource
    Electronic Resource
    Chichester : Wiley-Blackwell
    International Journal for Numerical Methods in Fluids 26 (1998), S. 443-457 
    ISSN: 0271-2091
    Keywords: direct numerical simulation ; 2D temporal disturbance ; plane Poiseuille flow ; finite difference method ; transient non-linear equation ; stream-function-vorticity equation ; Engineering ; Numerical Methods and Modeling
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: A direct numerical scheme is developed to study the temporal amplification of a 2D disturbance in plane Poiseuille flow. The transient non-linear Navier-Stokes equations are applied in a region of wavelength moving with the wave propagation speed. The complex amplitude involved in the perturbation functions is considered as the initial input of the non-linear stability equations. In this study a fully implicit finite difference scheme with five points in the flow direction and three points in the normal direction is developed so that numerical simulation of the amplification of a two-dimensional temporal disturbance in plane Poiseuille flow can be investigated. The growth and decay of the disturbance with time are presented and neutral stability curves which are in good agreement with existing solutions can be determined. The critical conditions as a function of the amplitude A0 of the disturbance are presented. Fixing the wavelength, the Navier-Stokes equations are solved up to Re=10,000 a friction factor increasing with Reynolds number is observed. The 2D non-linear behaviour of the streamfunction, vorticity and velocity components at Re=10,000 are also exhibited. © 1998 John Wiley & Sons, Ltd.
    Additional Material: 10 Ill.
    Type of Medium: Electronic Resource
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  • 5
    Publication Date: 2001-12-26
    Print ISSN: 0163-1829
    Electronic ISSN: 1095-3795
    Topics: Physics
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