ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
We have done extensive investigations on AuSi liquid alloy ion sources of different alloy compositions. The influence of source temperature and tip radius on current–voltage characteristics, emission current stability, and angular distribution has been investigated. The results are compared with those of other investigated liquid alloy ion sources. The mass spectra were measured as a function of source current, source temperature, and source operating time. The sources were tested in the ETH/PSI 30 kV focused ion beam system in Zurich. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1146671
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