Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Review of Scientific Instruments
65 (1994), S. 2853-2854
ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
An atomic force/scanning tunneling (AFM/STM) microscope intended for operation inside a scanning electron microscope (SEM) is described. This AFM/STM/SEM system enables us to image a sample conventionally by SEM as well as to investigate the local surface topography by AFM or STM. This device incorporates a new method for monitoring AFM cantilever deflection that utilizes the focused electron beam of the SEM.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1144627
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