Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
65 (1994), S. 3011-3013
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
As-deposited epitaxial YBa2Cu3O7−x films have been prepared by laser ablation in molecular oxygen followed by a cooling procedure in an electron cyclotron resonance (ECR) plasma. We demonstrate that cooling in a plasma provides a more homogeneous oxygenation than cooling in a neutral oxygen environment. Alternating-current susceptibility, resistivity, and x-ray diffraction measurements have been used to compare the influence of the cooling in an ECR oxygen plasma and a neutral oxygen environment on the properties of YBa2Cu3O7−x thin films. The role of the atomic oxygen content of the plasma is discussed starting from an optical and electrical diagnosis of the plasma. © 1994 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.112492
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