ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
By using an atomic-force-microscope-based technique, we image the vibration of high-frequency, bulk-mode, thin-film resonators. Our experimental technique is capable of monitoring the vibration of these devices over a broad frequency range, from 1 MHz to beyond 10 GHz, allowing us to obtain quantitative measurements of the piezoelectric properties of thin-film materials in that frequency range. This technique allows us to map the complex vibration modes of a new generation of high-frequency bulk piezoelectric resonators, revealing the presence of vibration patterns of very different characteristic lengths. © 2000 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.126901
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