ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
A micropositioning stage for use with an x-ray microscope has been developed to scan samples over a 100 μm×100-μm area with a resolution of 100 A(ring). The stage employs flexure hinges driven by piezoelectric actuators to achieve this high positioning accuracy. Due to the severe geometry of the hinges, stresses and deflections are determined (via finite element methods) to ensure a credible design. Since the stage is to be used in a stepping capacity, natural frequencies are computed to identify resonant conditions which could potentially cause excessive deflections. The finite element models show that the stage responds like a discrete lumped-mass system for the lower modes, and a continuous system with flexural characteristics for the higher modes.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1142713
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