ISSN:
0032-3888
Keywords:
Chemistry
;
Chemical Engineering
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Coating the substrate with an amorphous polymer layer is a very common process in the manufacturing of integrated circuits, but the fundamental spin-coating mechanism has not yet been precisely determined. This study examines the influence of the macromolecular characteristics on the spin-coating process both experimentally and from a phenomenological point of view. It is concluded that the weight-average molecular weight of the spun-on solution is a pertinent parameter, and that chain entanglements in polymer solutions may be considered as the basic phenomenon responsible for the formation of the solid polymer layer.
Additional Material:
5 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/pen.760281502
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