ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Metrology plays an important role in the development and commercialisation of micro andnanotechnology. For calibrating versatile micro- and nanoscale standards, a dimensional metrologyinstrument coupled with multi sensor heads including atomic force microscope (AFM), tactile stylus,laser focus sensor and assembled cantilever probes (ACPs) has been developed. Two kinds of ACPsare highlighted in the paper. One is fabricated by gluing a vertical AFM cantilever to a horizontalAFM cantilever using micro assembling techniques. It is applicable for direct and non-destructivemeasurements of sidewall surfaces. The other is an ACP ball probe designed for true 3Dmeasurements of micro structures. It is realised by gluing a tungsten wire with a probing sphere ball,40 ... 120 µm in diameter, to a horizontal AFM cantilever. The ACP ball probe has advantages such assmall probing forces (〈1µN) and high probing sensitivity. Some typical calibrations on micro andnano structures such as step height, grating and sphere calotte artefact are introduced
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/57/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.381-382.7.pdf
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