ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The stability of the electrical isolation in n-type GaAs layers irradiated with ions of different mass is compared. The irradiations were performed with proper doses of 1H+, 4He+, or 11B+ ions to create specific damage concentration level which lead to: (i) the trapping of practically all the carriers (Rs (approximate)108 Ω/(square, open)), (ii) the onset of hopping conduction (Rs (approximate)108 Ω/(square, open)), and (iii) a significant hopping conduction (Rs (approximate)106 Ω/(square, open)). Irrespectively of the ion mass, the temperature range for which the isolation is preserved, i.e., Rs 〉108 Ω/(square, open), extends up to 200 or (approximate) 600 °C, respectively, for the cases (i) and (ii). In case (iii), this range comprises temperatures from (approximate) 400 to 650 °C. Annealing stages at 200 and 400 °C recover in a great extent the conductivity and improve the carrier mobility in low dose irradiated samples [case (i)]. In samples irradiated to higher doses [cases (ii) and (iii)], the conductivity recovers in a single stage. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.364229
Permalink