ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Many research works have been focusing on nanoimprint technology due to the recentpotential mass production for the nanostructure applications. For optical or display application, ananoimprint mold of large area becomes one of the thorniest techniques since it takes much time tofabricate the whole mold with nanostructure and it may make the beginning nanostructuresinconsistent with the final ones. In order to fabricate the nanostructure mold of large area in a shorttime, the plasma process forming nanostructures on silicon substrate and the electroforming processare explored in the current study. Well-aligned nanotip arrays of 4 inch silicon were fabricated byelectron cyclotron resonance (ECR) plasma process using gas mixtures of silane, methane, argon,and hydrogen. The resultant tips have nano-scale apexes, approximately ~1 nm, with high aspectratios, nearly ~15, which were achieved by simultaneous SiC nano-mask formation and dry etchingduring ECR plasma process. Next, the nickel mold of nanostructures is made from siliconnanostructures through the electroforming process by using Nickel Sulfamate. The total thickness ofthe nickel mold is 120 μm after a 10-hour-long electroforming process. The nanostructures of 100nm diameter holes are successfully obtained. Nanoimprint process is proceeded by the nickel moldand the reflectance of the PMMA after imprinting at 160 °C has the lowest value, 0.2 %, comparedwith the other results for the incident optical wavelength of 550 nm. The large-area imprint moldwith high-aspect-ratio nanotip arrays of sub-micron diameter is fabricated and is proofed by theoptical application
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/56/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.364-366.607.pdf
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