Publication Date:
2015-02-03
Description:
Impact of set/reset pulse duration and amplitude on the endurance failure modes of TiN\Ta 2 O 5 \Ta cells is investigated and is related to interaction between Oxygen and TiN bottom electrode during reset. Hourglass electrical switching simulation of conductive filament temperature during reset transient and ab-initio calculation of reaction energy further support this degradation mechanism. Based on this understanding, endurance improvement is achieved by using shorter reset pulse and/or using inert Ru bottom electrode.
Print ISSN:
0003-6951
Electronic ISSN:
1077-3118
Topics:
Physics
Permalink