Publication Date:
2011-07-13
Description:
Author(s): A. Benediktovitch, A. Ulyanenkov, F. Rinaldi, K. Saito, and V. M. Kaganer A method is proposed to determine the concentration and relaxation depth profiles in graded epitaxial films from x-ray reciprocal space maps (RSMs). Various approximations in the kinematical x-ray diffraction from epitaxial films with the misfit dislocation density depth profile are developed. We sh... [Phys. Rev. B 84, 035302] Published Tue Jul 12, 2011
Keywords:
Semiconductors II: surfaces, interfaces, microstructures, and related topics
Print ISSN:
1098-0121
Electronic ISSN:
1095-3795
Topics:
Physics
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