ISSN:
1573-482X
Source:
Springer Online Journal Archives 1860-2000
Topics:
Electrical Engineering, Measurement and Control Technology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract The projection microscope, based on a copper-vapour laser (CVL), is a unique system which combines the capabilities of a high magnification optical microscope and the performance of a high quality laser. The system performance with respect to high T c superconducting (HTSC) device technology was studied using a scanning electron microscope. CVL patterning of YBaCuO films was demonstrated down to less than 2 μm. The thin films could be partially etched in depth just by controlling the laser pulse power density. In addition in HTSC device applications it could remove layers from thin films up to a complete etching.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1023/A:1008978801081
Permalink