ISSN:
1573-7357
Source:
Springer Online Journal Archives 1860-2000
Topics:
Physics
Notes:
Abstract We have measured the characteristics of aluminum tunnel junctions during and immediately after the formation of the junction. This has permitted us to observe changes in the oxide barrier, in vacuum and in air. By observing the barrier resistance during sputtering, we were able to diagnose and correct problems due to plasma discharges which were damaging the junctions. We report preliminary results from junctions passivated with a silicon nitride cap layer.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00693482
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