ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
A simple method to extract the intrinsic mechanical properties of the soft metallic thinfilms on hard substrates by nanoindenation is presented. Utilizing the geometry relationship ofresidual impressions obtained by the SEM image and the cross-sectional profile, the pile up error inelastic modulus determination of soft thin films by the Oliver and Pharr analysis is first corrected.Knowledge of the ‘true’ elastic modulus, the ‘true’ hardness of thin film is then extracted from themeasured contact stiffness data for an elastically homogeneous film-substrate system. The presentmethod is applied for a 504 nm Au thin film sputter deposited on the glass substrate and the resultsshow that the ‘true’ elastic modulus and hardness of Au film are 80 GPa and 1.3 GPa, which are inagreement well with the literatures
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/18/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.561-565.2005.pdf
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