ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
A synchrotron radiation beamline and reaction chamber were constructed for the study of synchrotron radiation excited photochemical reactions, especially for their application to semiconductor processes. Characteristics of this experiment and experimental results with chemical vapor deposition and etching in this beamline are described. The potential of this new application is discussed.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1140807
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