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  • 1
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 70 (1991), S. 2791-2798 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Device-quality a-Si:H thin films, grown by rf magnetron sputtering, were annealed in the temperature range up to 850 °C and studied by in situ ellipsometry, spectroscopic ellipsometry, and thermal evolution measurements. Annealing causes a volume reduction which can be as high as 5%, and after annealing at T(approximately-greater-than)800 °C the material becomes microcrystalline with an average crystallite size that depends on the annealing temperature. A detailed analysis of the peak height of the imaginary part of the pseudodielectric function 〈ε(ω)〉, combined with the examination of the fundamental gap, the average gap (Penn gap), and the refractive index of a-Si:H, provides new insight on the role of hydrogen and the structural modifications induced by thermal annealing. Based on the presented experimental findings we propose the following: (a) annealing below Ts causes reduction of the isolated microvoids; (b) the weakly bound hydrogen is correlated with regions with a high density of microvoids; and (c) the evolution of weakly bound hydrogen does not drastically influence the optical properties of the film while evolution of isolated hydrogen does. The rate of change of the optical properties as a function of T is (a) nearly constant for TT〈 Ts, (b) increases for T (approximately-greater-than) Ts, and (c) decreases dramatically for T(approximately-greater-than)600 °C, therefore indicating irreversible structural changes at T (approximately-greater-than) Ts mainly due to isolated hydrogen loss.
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  • 2
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 69 (1991), S. 3995-4002 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Thin Si3N4 films were grown on Si by direct exposure to a low-temperature (250–650 °C) nitrogen glow discharge at 13.56 MHz. The activation energy for growth is 0.3±0.12 eV. Their chemical and electronic, bulk, and interfacial properties are studied as a function of the film thickness and growth temperature. The ultrathin films (d〈100 A(ring)) exhibit an average breakdown field of 10–12 MV/cm, a dielectric constant equal to 5.5, and are effective barriers against oxidation at 1000 °C. Conduction in ultrathin films is via Fowler–Nordheim tunneling over the temperature range 77–420 K. Deep-level transient spectroscopy analysis reveals the presence of two majority-carrier (hole) traps at the interface, with activation energies 0.1 and 0.35 eV, respectively. The trap at EV+0.35 eV is attributed to the Si dangling bond defect while the trap at EV+0.1 eV could be attributed to a structural defect that is in situ annealed at growth temperatures higher than 500 °C. The interface state concentration is a sensitive function of the growth temperature and varies in the range 8×1010–6×1012 cm−2.
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  • 3
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 73 (1993), S. 2995-3000 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Thin amorphous Si3N4 films grown on Si are studied with the near-edge x-ray absorption fine structure (NEXAFS) characterization technique. The N dangling bonds in N-rich films give rise to a strong resonance line (RL) at the onset of the N 1s absorption edge, with an intensity that increases with the N/Si ratio. Further evidence on the origin of the RL is provided by the NEXAFS spectra from nitrogen-implanted Si and Si3N4 films bombarded with Ar+ ions. The RL can be annealed out after annealing at temperatures higher than the growth temperature. We propose that the annealing of the RL is due to formation of Si—N bonds, where the Si atoms are provided by the stressed interface. The velocity of the annealing process is controlled by the diffusivity of Si interstitials in the Si3N4 and the process is characterized by an activation energy of 0.86 eV.
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  • 4
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 80 (1996), S. 5742-5747 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The effect of bonded hydrogen in the atomic microstructure of nitrogen-rich SiNx:H films is investigated using extended x-ray-absorption fine-structure spectroscopy (EXAFS). The hydrogen concentration in the examined films, as measured by elastic recoil detection analysis, takes values in the range 25–33 at. %. It is shown that hydrogen, which is mostly bonded to N, alters the film microstructure, as that is determined by the nearest-neighbor distances and coordination numbers. The measured N–Si nearest-neighbor distance is modified by the presence of N—H bonds and it is shorter than that corresponding to Si3N4 by 3%. This bond length reduction is attributed to the higher electronegativity of hydrogen than that of the replaced Si atoms. In addition, the coordination number N in the nearest-neighbor shell, consisting of Si atoms, is reduced to 2 from the expected coordination of 3 in Si3N4. Furthermore, EXAFS detects the presence of partially reacted Si (a-Si:N) phase, embedded in the SiN matrix, the concentration of which depends on the deposition conditions (rf power and gas flow ratio). The existence of the a-Si:N phase is confirmed by plane-view transmission electron microscopy measurements. © 1996 American Institute of Physics.
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  • 5
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 75 (1994), S. 2980-2987 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The electrical and structural characteristics of GaxIn1−xP/GaAs heterostructures grown by metal-organic molecular-beam epitaxy (MOMBE) at 480–560 °C and metal-organic vapor-phase epitaxy (MOVPE) at 700 °C are comparatively studied. For the lattice-matched composition (x=0.51) transport in Schottky diodes fabricated on MOVPE material is almost thermionic and the barrier height is 0.96±0.05 eV. Deviation from the ideal thermionic behavior is observed in diodes on MOMBE material and the deviation is stronger as the growth temperature decreases. The undoped MOMBE material, grown at TG≤520 °C, as well as the MOVPE material, are characterized by a deep electron trap with an activation energy of 0.80±0.05 meV. The formation of this trap in the MOMBE and MOVPE material is suppressed by doping with shallow impurities, at doping levels higher than 1017 cm−3. However, doping of MOMBE Ga0.51In0.49P (hereafter called GaInP) with S and Si introduces another trap with an activation energy of about 300 meV, which has some of the properties of the DX centers, while Se doping of MOVPE GaInP does not introduce any donor-related traps. Rapid thermal annealing of the MOMBE material, at temperatures up to 600 °C, improves the Schottky barrier characteristics and reduces the deep trap concentration. An additional trap with an activation energy of about 500 meV, that has been identified in lattice-matched MOMBE Ga0.51In0.49P epilayers, is attributed to the electrical activity of dislocations, which have been identified with transmission electron microscopy (TEM) studies. Furthermore, the TEM analysis reveals the presence of compositional separation phenomena (spinodal decomposition) which are strong in the MOMBE material and less extended in the MOVPE material.
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  • 6
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 80 (1996), S. 2720-2727 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The microstructural properties of stoichiometric surface and buried Si3N4 films, fabricated with 15N ion implantation into Si wafers, are studied using the extended x-ray absorption fine structure (EXAFS) and near-edge x-ray absorption fine structure (NEXAFS) spectroscopies. Complementary information about the film composition and structure is provided by nuclear reaction analysis (NRA) and cross-section transmission electron microscopy (XTEM). The films have been characterized in the as-implanted state and after annealing in the temperature range 1100–1200 °C. For all the examined films, the N/Si ratio at the peak of the nitrogen profile, as measured by NRA is 1.33, a value that corresponds to stoichiometric nitrides. However, small compositional deviations towards a N-rich composition are detected by EXAFS in the surface nitrides. The excess nitrogen is also detectable in the NEXAFS spectra, where it introduces a characteristic resonance line superimposed to the absorption edge. Finally, XTEM observations confirm the formation of the nitride layers and reveal different degrees of damage at the Si3N4/Si interface for the low and high energy implantations, respectively. © 1996 American Institute of Physics.
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  • 7
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 58 (1991), S. 137-139 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The GaAs-insulator interface is characterized by deep level transient spectroscopy (DLTS) and isothermal capacitance transient spectroscopy (ICTS). It is demonstrated that while DLTS can only detect transients with temperature-dependent emission rates, ICTS can detect temperature-independent phenomena as well. The GaAs-insulator interface is characterized by two electron traps, with activation energies 0.67 and 0.23 eV, respectively, and a tunneling component that is detected only by ICTS. This tunneling component, which dominates the ICTS spectrum at 80 K〈T〈 180 K and is characterized by a field-induced barrier reduction given by ΔEE=1.4×10−3q(square root of)E, is attributed to pure tunneling.
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  • 8
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 69 (1996), S. 4206-4208 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Cubic and hexagonal GaN thin films are studied using the angular dependence of the near-edge x-ray absorption fine structure (NEXAFS) spectra recorded at the N–K edge. It is shown that the energy positions of the NEXAFS resonances are characteristic of the cubic and hexagonal structures and, thus, the NEXAFS spectra can be used as a fingerprint of the symmetry of the examined crystal. Deviations from the zinc-blende or wurtzite phases are clearly detectable since they lead to a systematic energy shift in the NEXAFS resonances. Finally, a method is proposed for the quantitative estimation of the percentages of the cubic and wurtzite phases present in a mixed crystal. © 1996 American Institute of Physics.
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  • 9
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 83 (1998), S. 5804-5809 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The microstructure and the annealing behavior of N-rich SiNx films are studied with x-ray absorption measurements at the N-K edge. The SiNx films were fabricated with ion implantation of 35 keV N+ ions into Si substrates, in the dose range 2×1017–2×1018 ions/cm2. The near-edge x-ray absorption fine structure (NEXAFS) spectra of the N-rich films are characterized by a strong resonance line (RL2) at 403.3±0.1 eV whose intensity increases with the implantation dose. RL2 is attributed to dipole electron transitions, from 1s to unoccupied p orbitals, at a defect site containing a N dangling bond defect. The defect related to RL2 has high thermal stability and is practically unaffected by vacuum annealing up to 1000 °C. One more defect-related resonance (RL1) is detected at 401.1±0.3 eV in the films fabricated with the lower and intermediate used implantation doses (2×1017 and 1×1018 cm−2, respectively). The activation energy for the annealing of RL1 is 0.50±0.05 eV. Extended x-ray absorption fine structure spectroscopy (EXAFS) on the as-implanted and annealed films reveals that subnitrides are formed upon implantation. These nitrides are characterized by a Si-N nearest-neighbor distance which is comparable to that of the reference nitride, while the coordination number in the first nearest-neighbor shell N1 depends on the implantation dose. The stoichiometry deviation, as measured from the value of N1 which takes values between 1.7 and 2.8 for the limiting doses of 2×1018 and 2×1017 cm−2, respectively, shows the correlation between the RL2 in the NEXAFS spectra and the presence of N dangling bonds in the as-implanted films. © 1998 American Institute of Physics.
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  • 10
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 82 (1997), S. 1166-1171 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Hexagonal AlN, epitaxially grown on GaAs, is studied using x-ray absorption measurements at the N-, O-, and Al-K edges. The measured distances of the nitrogen nearest neighbors (nn) are found shorter than expected by 0.04–0.13 Å for the first to third nn shells, respectively. Nitrogen atoms are fourfold coordinated with Al as first nearest neighbors (nn), while Al atoms are fourfold coordinated with N and O atoms. The Al–N distance is 1.85 Å, i.e., it is smaller by 0.04 Å than expected. A reduction in the nn distances is also observed in the second and third nn shells where the N–N and the N–Al distances are found 0.07 and 0.13 Å shorter than expected, respectively. The reduction in the nn distances is attributed to the presence of oxygen contamination. The Al–O distance is only 0.18 Å smaller than the Al–N distance, i.e., O is a substitutional impurity in the N sublattice. The characteristic angular dependence of the N-K edge NEXAFS spectra verifies the hexagonal structure of the AlN film. Moreover, from the dependence of the areas under the NEXAFS resonances versus the angle of incidence cursive-theta, the directions of maximum electron charge densities are determined. Finally, the p-partial density of states in the conduction band is discussed. © 1997 American Institute of Physics.
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