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  • 1
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 75 (1994), S. 2007-2014 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Interfacial reactions of ultrahigh vacuum deposited Y-Si multilayer thin films have been studied by both conventional and high-resolution transmission electron microscopy, Auger electron spectroscopy, and x-ray diffraction. An amorphous Y-Si intermixing layer with a composition approximately equal to YSi2 was found to form in multilayer films with a composition ratio of 1Y:2Si at room temperature. Homogenization in atomic composition in the amorphous phase proceeded in samples annealed at 250–350 °C. In samples annealed at 400 °C for 30 min, the amorphous layer was completely transformed to crystalline YSi2. The formation of crystalline Y5Si3 and YSi was detected in as-deposited samples with concentration ratios 1Y:1Si and 5Y:3Si as well as in samples prepared with excess Y. Y5Si3 was the only silicide phase present in 5Y:3Si films after 400 °C annealing. The results indicated that the phase formation and stability in Y-Si multilayers depend critically on the composition. Based on the prediction of a growth control model, it was concluded that the formation of amorphous layer at room temperature is controlled by nucleation.
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  • 2
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 75 (1994), S. 3441-3445 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: High quality Si/Si1−xGex superlattices having layers as thin as 1.5 nm have been grown by an ultrahigh vacuum/chemical vapor deposition system. High-resolution double-crystal x-ray diffraction, and conventional and high-resolution cross-sectional transmission electron microscopy were used to evaluate the crystalline quality of these superlattices. A dynamical x-ray simulation program was employed to analyze the experimental rocking curves. Excellent matches between experimental rocking curves and simulated ones were obtained for all superlattices with various periodicity. A cross-sectional transmission electron micrograph of an 80 period Si(4.2 nm)/Si0.878Ge0.122 (1.5 nm) superlattice, in which each individual layers was clearly resolved, demonstrated the capability of this growth technique for nanometer thick layer deposition.
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  • 3
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 73 (1993), S. 5280-5282 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Formation of amorphous interlayers (a interlayers) has been observed in the interfacial reactions of ultrahigh vacuum deposited yttrium thin films on atomically clean (111)Si at low temperatures. The observation of the a interlayer in the Y/Si system represents the first report of solid-state amorphization for rare-earth metal/Si systems. The Y/Si system is also the only system found to date among all metal/Si systems in which the a interlayer can be grown to a thickness exceeding 10 nm during deposition at room temperature. A process involving significant diffusion of both Y and Si atoms is proposed to account for the dependence of amorphization on the thickness of deposited yttrium films.
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  • 4
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 71 (1992), S. 3307-3312 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The evolution of vacancy ordering and defect structure in epitaxial YSi2−x thin films on (111)Si have been studied by both conventional and high-resolution transmission electron microscopy. Epitaxial YSi2−x with an ordered vacancy structure was grown on (111)Si by rapid thermal annealing. In samples annealed at 500 °C for 120 s epitaxial YSi2−x was found to form. After annealing at 600 °C for 15 s, the appearance of additional diffraction spots is attributed to the formation of an ordered vacancy superstructure in the epitaxial YSi2−x thin films. In samples annealed at 600 °C for longer time or higher temperatures, the splitting of extra diffraction spots is correlated to the formation of an out-of-step structure. Streaking of the split diffraction spots in the diffraction pattern is attributed to the presence of an out-of-step structure with a range of M values. The M was found to settle down to 2 after high-temperature and/or long time annealing. Planar defects in YSi2−x films were analyzed to be stacking faults on {101¯0} planes with 1/6 〈1¯21¯3〉 displacement vectors. Computer simulation was carried out to determine the atomic structure of stacking fault. The simulated images are seen to match rather well with experimental images taken under two different values of defocus.
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  • 5
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 73 (1993), S. 8258-8266 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Interfacial reactions of ultrahigh vacuum deposited yttrium thin films on atomically clean (111)Si at low temperatures have been studied by both conventional and high-resolution transmission electron microscopy, Auger electron spectroscopy, and x-ray diffraction. A 10-nm-thick yttrium thin film, deposited onto (111)Si at room temperature, was found to completely intermix with Si to form an 11-nm-thick amorphous interlayer. Crystalline Y5Si3 and Si were observed to nucleate first within the amorphous interlayer in samples annealed at temperatures lower than 200 °C. Epitaxial YSi2−x was found to be the only phase formed at the interface of amorphous interlayer and crystalline Si in samples annealed at temperatures higher than 250 °C. In as deposited 20- to 60-nm-thick Y thin films on silicon samples, crystalline Y5Si3, Si, and YSi and a 2.5-nm-thick amorphous layer were found to be present simultaneously. Good correlations were found among difference in atomic size between metal and Si atoms, the calculated free energy of mixing as well as the critical and maximum amorphous interlayer thickness for the Y/Si and a number of refractory metal/Si systems. The Y/Si system is the only system found up to date among all metal/Si systems that the a interlayer can be grown to a thickness exceeding 10 nm during deposition at room temperature.
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  • 6
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 67 (1995), S. 2350-2352 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The built-in electric field and surface Fermi level in the InAlAs surface-intrinsic-n+ structures were studied by room-temperature photoreflectance. The samples were grown by molecular beam epitaxy with an undoped layer thickness of 1000 A(ring). The undoped layer was subsequently etched to 800, 600, 400, and 200 A(ring). Different chemical solutions were used in the etching process and the built-in electric field is found independent of the etching process. While the surface Fermi level, in general, varies with the undoped layer thickness, there exists, for each Al concentration, a certain range of thicknesses within which the surface Fermi level is weakly pinned. From the dependence of electric field and surface Fermi level on the undoped layer thickness, we conclude that the surface states distribute over two separate regions within the energy band gap and the densities of surface states are as low as 1.02±0.05×1011 cm−2 for the distribution near the conduction band and 2.91±0.05×1011 cm−2 for the distribution near valence band. © 1995 American Institute of Physics.
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  • 7
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 67 (1995), S. 1256-1258 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The electron effective mass of InAlGaAs lattice matched to InP has been determined as a function of Al content. The electron effective mass is obtained from far-infrared optically detected cyclotron resonance (ODCR). In ODCR, the carriers are provided by optical pumping, and hence no doping is necessary. Unlike previous reports, we are able to detect the cyclotron resonance signal of a thin intrinsic epilayer at low temperature. Thus corrections of nonparabolicity are not required. In addition, from photoluminescence measurement, we determine the band-gap energy. Both the effective mass and band-gap energy show a nonlinear variation with Al composition. © 1995 American Institute of Physics.
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  • 8
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 79 (2001), S. 515-517 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The thin-film x-ray standing wave (XSW) technique is used for an atomic-scale study of polarization switching in ferroelectric Pb(Zr0.3Ti0.7)O3 (PZT)/electrode heterostructures grown on SrTiO3(001). The XSW is selectively generated in the PZT by the interference between the incident x-ray wave and the weak (001) Bragg diffracted wave from the film. The XSW excites a fluorescence signal from the Pb ions in the PZT film, that is used to determine their subangström displacements after polarization switching has occurred. This experimental method yields unique information on the underlying atomic configurations for different polarization domain states. © 2001 American Institute of Physics.
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  • 9
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 64 (1994), S. 3314-3316 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We have studied the band gaps and the surface Fermi level positions of a series of In1−xAlxAs surface-intrinsic-n+ structures at room temperature by photoreflectance. Experiments demonstrated that over aluminum concentrations of 0.42–0.57, the surface Fermi level is not pinned at midgap, as commonly believed, but instead varies, respectively, from 0.50±0.01 to 0.81±0.01 eV below the conduction band edge.
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  • 10
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 60 (1992), S. 2628-2630 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Direct observation of the Si delta-doped layer in GaAs has been achieved by high resolution transmission electron microscopy. Samples with different Si doses, from half a monolayer to two monolayers, were studied. The observed spreading of the delta-doped layer showed that Si atoms are largely confined in five monolayers at most (in the highest dose case), indicating excellent confinements of dopants in GaAs. From the images, the Si atoms were uniformly distributed in the doped layer, no cluster formation was observed. For delta-doped GaAs grown at low temperature (480 °C), stacking faults originated from the doped layers were observed. These faults were thought to be caused by the large unrelaxed strain in the low-temperature grown GaAs.
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