ISSN:
1432-0630
Keywords:
PACS: 39.10.+j
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract. A system for parallel synthesis of atomically regulated lattices and nano-structured heterojunctions has been developed. This combinatorial laser MBE system is composed of a UHV-PLD chamber, scanning RHEED for in situ diagnostics of reactions at various areas of substrate surface, a pair of fixed and moving masks to define the film deposition area, and a computer for controlling the operation conditions as functions of deposition area and time. In this system, oxide layered lattice strips were deposited in parallel on a SrTiO3 substrate under RHEED observation of individual strips with different compositions and/or layer thickness.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s003399900362
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