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  • 1
    Electronic Resource
    Electronic Resource
    Springer
    Semiconductors 33 (1999), S. 965-969 
    ISSN: 1063-7826
    Source: Springer Online Journal Archives 1860-2000
    Topics: Electrical Engineering, Measurement and Control Technology , Physics
    Notes: Abstract The characteristics of III-V nitride semiconductor epitaxial layers grown by metalorganic chemical vapor deposition are of interest for the realization of many technologically important devices. This paper will review heteroepitaxial growth on (0001) sapphire substrates as well as the selective-area and subsequent lateral epitaxial overgrowth on masked substrate surfaces.
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  • 2
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The optical properties of undoped and modulation-doped AlGaN/GaN single heterostructures (SHs) grown by metalorganic chemical vapor deposition are investigated at low temperature using photoluminescence measurements. The formation of a two-dimensional electron gas at the heterojunction is verified by temperature-dependent Hall mobility and 300 K capacitance-voltage measurements. Radiative recombination is observed between the electrons in two-dimensional quantum states at the heterointerface and the holes in the flat-band region or bound to residual acceptors both in undoped and modulation-doped AlGaN/GaN SHs. These peaks disappear when the top AlGaN layer is removed by reactive ion etching. In addition, the photoluminescence results under different laser excitation intensity and lattice temperature are also described for undoped and modulation-doped AlGaN/GaN SHs with various Al compositions and growth interrupt times. © 2001 American Institute of Physics.
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  • 3
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 70 (1997), S. 1992-1994 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We report a very low dark current (∼57 pA at 10 V reverse bias) metal–semiconductor–metal photodetectors fabricated on GaN epitaxial layers grown by low-pressure metalorganic chemical vapor deposition. The photodetectors exhibit the typical sharp band-edge cutoff, with good responsivity. There is indication of a photoconductive gain mechanism. We also performed a Medici simulation to establish an effective area for current density calculations. © 1997 American Institute of Physics.
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  • 4
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 83 (1998), S. 6148-6160 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We report on the material, electrical, and optical properties of metal–semiconductor–metal ultraviolet photodetectors fabricated on single-crystal GaN, with active layers of 1.5 and 4.0 μm thickness. We have modeled current transport in the 1.5 μm devices using thermionic field emission theory, and in the 4.0 μm devices using thermionic emission theory. We have obtained a good fit to the experimental data. Upon repeated field stressing of the 1.5 μm devices, there is a degradation in the current–voltage (I–V) characteristics that is trap related. We hypothesize that traps in the GaN are related to a combination of surface defects (possibly threading dislocations), and deep-level bulk states that are within a tunneling distance of the interface. A simple qualitative model is presented based on experimental results. For devices fabricated on wafers with very low background free electron concentrations, there is a characteristic "punch-through" voltage, which we attribute to the interaction of the depletion region with the underlying low-temperature buffer layer. We also report GaN metal–semiconductor–metal photodetectors with high quantum efficiencies (∼50%) in the absence of internal gain. These photodetectors have a flat responsivity above the band gap (measured at ∼0.15 A/W) with a sharp, visible-blind cutoff at the band edge. There is no discernible responsivity for photons below the band-gap energy. We also obtained record low dark current of ∼800 fA at −10 V reverse bias. The dark current and ultraviolet photoresponse I–V curves are very flat out to VR〉−25 V, and do not show evidence of trap-related degradation, or punch-through effects. © 1998 American Institute of Physics.
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  • 5
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 73 (1998), S. 3875-3877 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The implantation of Si ions into undoped high-resistivity GaN films is of interest for the realization of high-performance digital and monolithic microwave integrated circuits. We report the effect of postimplant annealing conditions on the electrical, optical, and surface morphology of Si ion-implanted GaN films. We demonstrate high activation efficiencies for low-dose Si implants into unintentionally doped GaN/sapphire heteroepitaxial films. The Si ions were implanted through an epitaxial AlN cap layer at 100 keV and a dose ∼5×1014 cm−2. Samples were subsequently annealed in an open-tube furnace for various times and temperatures. The postanneal electrical activation is correlated with the surface morphology of the film after annealing. The samples annealed at 1150 °C in N2 for 5 min. exhibited a smooth surface morphology and a sheet electron concentration ns∼6.8×1013 cm−2. © 1998 American Institute of Physics.
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  • 6
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 71 (1997), S. 1537-1539 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We report the growth and characterization of InGaN heteroepitaxial thin films and quantum-well heterostructures on (0001) sapphire substrates. The III-N heteroepitaxial layers are grown by metalorganic chemical vapor deposition on sapphire substrates using various growth conditions. A comparison of the 300 K photoluminescence (PL) spectra of the samples indicates that a higher PL intensity is measured for the quantum-well structures having an intentional n-type Si-doping concentration. Furthermore, three-, five-, and eight-period InGaN quantum-well structures exhibit similar narrow PL spectra. © 1997 American Institute of Physics.
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  • 7
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 73 (1998), S. 333-335 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We describe the characteristics of single-crystal GaN regions obtained by selective-area and subsequent lateral epitaxial overgrowth using metal organic chemical vapor deposition. Under certain deposition conditions, the surface kinetics of the metal organic chemical vapor deposition process results in lateral growth of single-crystal GaN over the masked region. The lateral-to-vertical relative growth rate depends upon the orientation of stripe openings, the ratio of the "open" stripe width to the "masked" stripe width, and the growth conditions (e.g., temperature and V/III ratio). The specific orientations of the growth facets on the sidewalls of the laterally growing stripes are also dependent upon the growth conditions. The cathodoluminescence intensity of the GaN films indicate that improved materials are grown over the oxide mask. © 1998 American Institute of Physics.
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  • 8
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 73 (1998), S. 2405-2407 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We report on the temporal and the frequency response of metal-semiconductor-metal ultraviolet photodetectors fabricated on single-crystal GaN. The best devices show a fast 10%–90% rise time of ∼23 ps implying a bandwidth of 〉15 GHz. These time domain data have been corroborated by direct measurement of the power spectral content. From this a cutoff frequency, f3 dB, of ∼16 GHz has been obtained. Analysis in terms of reverse bias and geometric scaling indicates that the photodetectors are transit-time limited. Modeling of the temporal behavior indicates that a slow component in the time and frequency response data is a consequence of the hole drift velocity. © 1998 American Institute of Physics.
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  • 9
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 72 (1998), S. 542-544 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We report on the current transport mechanisms dominant at the Schottky interface of metal–semiconductor–metal photodetectors fabricated on single-crystal GaN, with active layers of 1.5 and 4.0 μm thickness. We have modeled transport in the 1.5 μm devices using thermionic emission theory, and in the 4.0 μm devices using thermionic field emission theory. We have obtained a good fit to the experimental data. We hypothesize that traps in the GaN are related to a combination of surface defects (possibly threading dislocations), and deep-level bulk states that are within a tunneling distance of the interface. A simple qualitative model is presented. © 1998 American Institute of Physics.
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  • 10
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 69 (1996), S. 3626-3628 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We report the growth and photoluminescence (300 and 4.2 K) characterization of unintentionally doped GaN on both exact and vicinal (0001) sapphire substrates. The GaN heteroepitaxial layers are grown by metalorganic chemical vapor deposition on sapphire substrates using various growth conditions. The (0001) Al2O3 c-plane substrates are oriented exactly (0001) or misoriented either 2° towards the a plane (112¯0), 5° towards the m plane (101¯0), or 9° toward the m plane. A comparison of the 300 and 4.2 K optical characteristics of the samples grown on the different substrates indicates that a higher photoluminescence intensity is measured for the films on misoriented substrates. © 1996 American Institute of Physics.
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