Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
54 (1989), S. 925-927
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
We show how strained-layer relaxation via misfit dislocation introduction varies significantly in GexSi1−x/Si (100) epitaxy as a function of the strain in this system. It is found that for samples grown by molecular beam epitaxy at a substrate temperature of 550 °C, structures with lower strain (x=0.15) are highly metastable, relaxing most of their excess stress on annealing to temperatures ∼650–750 °C. Structures with higher strain (x=0.25) are observed to relax far more gradually over the temperature range 550–900 °C. In situ electron microscope observations explain this behavior in terms of misfit dislocation interactions in the relaxing material.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.100810
Permalink
|
Location |
Call Number |
Expected |
Availability |