ISSN:
1572-9605
Keywords:
Superconductivity
;
TIPbSrCaCuO
;
thin films
Source:
Springer Online Journal Archives 1860-2000
Topics:
Electrical Engineering, Measurement and Control Technology
,
Physics
Notes:
Abstract Thin films of (Tl,Pb)Sr2Ca0.8Y0.2Cu2O7, and (Tl,Pb)Sr2CuO5 can be grown in a single step process which involves sputter deposition from a mixed oxide target and simultaneous thermal evaporation of Tl2O. The use of a radiant heater has allowed extension of this in situ deposition process to full LaAlO3 and NdGaO3 wafers. Variations in the composition of the deposited film is 〈 4% across a 50 mm wafer while the thickness uniformity is ≍ 8%. The highest transition temperature for a (Tl,Pb)Sr2Ca0.8Y0.2 Cu2O7 film thus far is 83 K. The RMS surface roughness of (Tl,Pb)Sr2CuO5 films is uniform across the wafer and approximately 1% of the film thickness for films 20 to 100 nm thick.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1023/A:1022683307738
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