ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
This article describes the analysis of the polytype transformation of SiC ingot. We analyzedthe sample by Raman spectroscopy and TEM observation. The result of the analysis shows thepolytype is transformed from 4H-SiC to 6H-SiC, and then returned to 4H-SiC. We found that thedirection of the c-axis is not the same as the growth direction of the ingot. And also we found theexistence of 8H-SiC at the interface between 6H-SiC and 4H-SiC region by the selected areadiffraction pattern and confirmed it by HR-TEM observation
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/20/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.600-603.365.pdf
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