ISSN:
1432-1130
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Chemie und Pharmazie
Notizen:
Abstract In this paper we report on the optimization of homoepitaxial InAs and InP growth in MOMBE (metalorganic molecular beam epitaxy). A correlation is made between good optical quality material and the observation of RHEED (reflection high energy electron diffraction) intensity oscillations. It will be shown, that in situ RHEED oscillations can be used to determine a growth parameter window in MOMBE.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/s002160050355
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