ISSN:
1432-0630
Keywords:
PACS: 81.65.Cf
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract. The replication of submicrometer-sized structures is accomplished utilizing replica molding of a UV-cured acrylate blend. Atomic force microscopy (AFM), optical, and scanning electron microscope images reveal acrylate residues on the Si-master after replication. The differences between excimer laser and reactive ion cleaning of the Si-masters in terms of their effectiveness and reliability is discussed. Forty to sixty KrF laser pulses at 400 mJ/cm2 are suitable for removing acrylate residues from the Si-masters, while the oxygen plasma etching removes acrylate residues only to a limited degree because of a silicon diacrylate constituent in the acrylate blend.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s003390051413
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