ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
Argon electron cyclotron resonance plasma characteristics discharged by 7.0, 8.0, and 9.4 GHz microwaves are measured at 0.013 and 0.080 Pa in a cylindrical chamber. The plasma densities and electron temperatures were found to be almost independent of the microwave frequency at 0.013 Pa, whereas clear differences were seen at 0.080 Pa. At 0.080 Pa, the plasma densities were observed to increase with the increase in the discharge frequency. Electron temperatures at 0.080 Pa also appeared to become higher with the increase in discharge frequency. © 2000 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1150315
Permalink