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  • 1
    Digitale Medien
    Digitale Medien
    Excimer laser photolysis of molybdenum hexacarbonyl with buffer gas (1989)
    Springer
    Applied physics 49 (1989), S. 301-305 
    Details
    ISSN: 1432-0649
    Schlagwort(e): 82.50 ; 81.15
    Quelle: Springer Online Journal Archives 1860-2000
    Thema: Physik
    Notizen: Abstract We have studied the photolysis of molybdenum hexacarbonyl by focused excimer laser radiation. It was found that electronically excited Mo atoms detected in the focus region of a KrF laser are due to a direct two photon absorption transition. The upper limit of the energy for complete dissociation of Mo(CO)6 has been derived from these results. Two photon dissociation in the gas phase should be the dominant process at metal film deposition on substrates positioned perpendicularly and near to the focus. Adding buffer gases to the organometallic vapor particle formation was observed in the whole irradiated gas volume. The analysis of scattered He-Ne laser light yields information about the density and size of these particles. Some conclusions are drawn with respect to structured metal film deposition with high spatial selectivity.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1007/BF00324177
    Standort Signatur Erwartet Verfügbarkeit
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    Artikel (Nationallizenzen)
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  • 2
    Digitale Medien
    Digitale Medien
    Laser photolytic deposition of molybdenum and tungsten thin film microstructures (1990)
    Springer
    Applied physics 50 (1990), S. 233-235 
    Details
    ISSN: 1432-0630
    Schlagwort(e): 81.15 ; 82.50
    Quelle: Springer Online Journal Archives 1860-2000
    Thema: Maschinenbau , Physik
    Notizen: Abstract We have deposited thin metal films of Mo and W with sub-μm lateral resolution using the photodissociation of the carbonyls by the frequency doubled radiation of an Arion laser at cw and ps-pulse operation, respectively. In both regimes similar curves are obtained for the intensity dependence of the deposition rate. No difference was observed for the lateral resolution using cw or ps-pulse irradiation. Measurements of the deposition rate as a function of the spot size indicate that the decomposition occurs in the adsorbed phase.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1007/BF00343423
    Standort Signatur Erwartet Verfügbarkeit
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    Artikel (Nationallizenzen)
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  • 3
    Digitale Medien
    Digitale Medien
    Doppler-free intracavity polarization spectroscopy using elliptically polarized light (1979)
    Springer
    Applied physics 20 (1979), S. 247-250 
    Details
    ISSN: 1432-0630
    Schlagwort(e): 33 ; 42.65
    Quelle: Springer Online Journal Archives 1860-2000
    Thema: Maschinenbau , Physik
    Notizen: Abstract The optically induced polarization change was studied in the case of a standing elliptically polarized wave. Using a Zeeman-tuned gas laser at 3.39 μm with an internal methane cell we have demonstrated the influence of the dichroism on the nonlinear absorption signals.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1007/BF00886025
    Standort Signatur Erwartet Verfügbarkeit
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    Artikel (Nationallizenzen)
    Volltext
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