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  • American Institute of Physics (AIP)  (5)
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  • 1
    Electronic Resource
    Electronic Resource
    Time-resolved measurements of ion energy distributions and optical emissions in pulsed radio-frequency discharges (2000)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 87 (2000), S. 2114-2121 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: In pulse-modulated inductively coupled plasmas generated in CF4:Ar mixtures, a transition between a capacitive coupling mode (E mode) and an inductive coupling mode (H mode) was observed. For a pulsed plasma in a 50%CF4:50%Ar volume mixture with a peak rf power of 200 W at 13.56 MHz and a modulation frequency at 500 Hz with a duty cycle of 95%, the E→H mode transition occurs repetitively 0.75 ms after each rf pulse is applied. This long delay in the mode transition allows us to perform not only time-resolved measurements of optical emission and electrical characteristics but also time-resolved measurements of ion energy distributions at the grounded electrode. These measurements show that a relatively short rf off period can severely perturb the equilibrium plasma state and its recovery may take much longer than the rf off period.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.372148
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  • 2
    Electronic Resource
    Electronic Resource
    Ion energy distributions and sheath voltages in a radio-frequency-biased, inductively coupled, high-density plasma reactor (1999)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 85 (1999), S. 3966-3975 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Ion energy distributions were measured at a grounded surface in an inductively coupled, high-density plasma reactor for pure argon, argon–helium, and argon–xenon discharges at 1.33 Pa (10 mTorr), as a function of radio-frequency (rf) bias amplitude, rf bias frequency, radial position, inductive source power, and ion mass. The ground sheath voltage which accelerates the ions was also determined using capacitive probe measurements and Langmuir probe data. Together, the measurements provide a complete characterization of ion dynamics in the sheath, allowing ion transit time effects to be distinguished from sheath impedance effects. Models are presented which describe both effects and explain why they are observed in the same range of rf bias frequency. © 1999 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.370298
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  • 3
    Electronic Resource
    Electronic Resource
    Evidence for inelastic processes for N+3 and N+4 from ion energy distributions in He/N2 radio frequency glow discharges (1996)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 79 (1996), S. 93-98 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The ion energy distributions (IEDs) striking surfaces in rf glow discharges are important in the context of plasma etching during the fabrication of microelectronics devices. In discharges sustained in molecular gases or multicomponent gas mixtures, the shape of the IED and the relative magnitudes of the ion fluxes are sensitive to ion–molecule collisions which occur in the presheath and sheath. Ions which collisionlessly traverse the sheaths or suffer only elastic collisions arrive at the substrate with a measurably different IED than do ions which undergo inelastic collisions. In this article we present measurements and results from parametric calculations of IEDs incident on the grounded electrode of a rf glow discharge sustained in a He/N2 gas mixture while using a Gaseous Electronics Conference Reference Cell (33.3 Pa, 13.56 MHz). We found that the shape of the IEDs for N+3 and N+4 provide evidence for inelastic ion–molecule reactions which have threshold energies of 〈10 eV. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.360795
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  • 4
    Electronic Resource
    Electronic Resource
    Electron attachment by haloalkenes and halobenzenes (1985)
    College Park, Md. : American Institute of Physics (AIP)
    The Journal of Chemical Physics 83 (1985), S. 5627-5634 
    Details
    ISSN: 1089-7690
    Source: AIP Digital Archive
    Topics: Physics , Chemistry and Pharmacology
    Notes: Electron transmission spectra and mass spectra of negative ions from dissociative electron attachment have been obtained for four series of halogenated alkenes: vinyl halides, chloroethylenes, halobenzenes, para-dihalobenzenes. The stabilizing effect of halogen substituents upon anion state energies is obvious. Systematic observations permit assignment of ∑ and ∏ anion states. Dissociative attachment usually proceeds through the ∏ anion state. An enormous enhancement of the cross section for dissociative attachment of threshold electrons is observed in some cases.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.449687
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  • 5
    Electronic Resource
    Electronic Resource
    Electron attachment by chloro and bromomethanes (1986)
    College Park, Md. : American Institute of Physics (AIP)
    The Journal of Chemical Physics 85 (1986), S. 249-254 
    Details
    ISSN: 1089-7690
    Source: AIP Digital Archive
    Topics: Physics , Chemistry and Pharmacology
    Notes: Electron transmission spectra and mass spectra of negative ions from dissociative electron attachment have been obtained for the series CCl4, CBrCl3, CBr2Cl2, and CBr4. Systematic changes are observed in the attachment energies of the t2 unoccupied orbitals in the end members and their split components in the mixed compounds. Cl− and Br− ion-production maxima are observed to correspond to attachment energies measured by ETS. Multiple scattering-Xα continuum calculations give elastic-electron-scattering cross sections for CCl4 and CBr4 which are consistent with experiment in the low energy region, but fail to reproduce the maximum in total cross section observed at higher energy. Calculated and experimental valence orbital I.P.'s and UV excitation energies for CCl4 and CBr4 are shown to be consistent with our electron transmission results.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.451644
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