Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Review of Scientific Instruments
61 (1990), S. 980-983
ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
Thin-film technology has been applied to microscope operation. Fabrication is compatible with standard silicon processing procedures enabling films and circuitry to be coproduced. A Mireau interferometer combining silicon nitride and metal films is characterized. Reflectance and transmittance curves are shown.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1141203
Permalink
|
Location |
Call Number |
Expected |
Availability |