ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
Previous work has shown that the sputtering yield of a matrix strongly affects the secondary ion yield of a material bombarded by reactive primary ions. Examining several homologous series of compounds, we have determined a linear correlation between sputtering yield and average substrate mass. This relationship enables quantitative predictions of the substrate sputtering yield and stoichiometry prior to SIMS analysis. This approach should be generally applicable to any sputtering technique.
Additional Material:
2 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740020308
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