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  • Elsevier  (158)
  • American Institute of Physics  (55)
  • Blackwell Publishing Ltd  (33)
  • American Institute of Physics (AIP)  (20)
  • 1995-1999  (217)
  • 1960-1964  (49)
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Year
  • 1
    Electronic Resource
    Electronic Resource
    Power deposition in high-density inductively coupled plasma tools for semiconductor processing (1995)
    [S.l.] : American Institute of Physics (AIP)
    Physics of Plasmas 2 (1995), S. 2597-2604 
    Details
    ISSN: 1089-7674
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A two-dimensional, computationally efficient numerical model is developed to study power deposition in high-density inductively coupled plasma sources. Calculations include both inductive coupling, caused by plasma response to external coil currents, and capacitive coupling, caused by plasma response to external voltages on the coils and wafer. Variation in current along the induction coil is determined self-consistently from the integral constraint of charge conservation. Sheath phenomena are incorporated through previously published analytic models. The system behavior is analogous in some respects to that of a transmission line. Comparison with measurement suggests that this model provides a good description of self-consistent coil response when the electric field exhibits less than a quarter wavelength per coil turn. © 1995 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.871222
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  • 2
    Electronic Resource
    Electronic Resource
    Nonlinear dynamics of the voice: Signal analysis and biomechanical modeling (1995)
    Woodbury, NY : American Institute of Physics (AIP)
    Chaos 5 (1995), S. 30-34 
    Details
    ISSN: 1089-7682
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Irregularities in voiced speech are often observed as a consequence of vocal fold lesions, paralyses, and other pathological conditions. Many of these instabilities are related to the intrinsic nonlinearities in the vibrations of the vocal folds. In this paper, bifurcations in voice signals are analyzed using narrow-band spectrograms. We study sustained phonation of patients with laryngeal paralysis and data from an excised larynx experiment. These spectrograms are compared with computer simulations of an asymmetric 2-mass model of the vocal folds. © 1995 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.166078
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  • 3
    Electronic Resource
    Electronic Resource
    1 nm x-ray lithography using novel mask fabrication technique (1998)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 69 (1998), S. 3350-3352 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: High-resolution commercial photomasks and x-ray masks are at present manufactured by a multistep process which involves the use of etching. This route imposes a limitation on the resolution that can be achieved. We describe here a new approach to the fabrication of x-ray masks involving the use of organometallic compounds which undergo direct conversion to metal under the influence of electron beam irradiation. This approach permits fabrication of both x-ray masks and extreme ultraviolet masks in essentially a single processing step. The attainable resolution is unaffected by any limitation incurred by etching processes and is dependent only on such factors as electron scattering and electron beam diameter. We describe here the production of a gold x-ray mask, which was used in conjunction with a compact laser plasma source to demonstrate the lithographic process. © 1998 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1149099
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  • 4
    Electronic Resource
    Electronic Resource
    Fourier transform infrared absorption spectroscopy of jet-cooled radicals (1995)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 66 (1995), S. 2430-2441 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: We describe an experiment that couples a high-resolution Fourier transform spectrometer (FTS) to a supersonic jet of radicals. A 1-mm-i.d. cylindrical SiC nozzle is resistively heated to 1500 K in order to decompose organic precursors and generate expansions of jet-cooled radicals. We have used this apparatus to pyrolyze alkyl nitrites to make alkoxy and nitric oxide radicals. The residence time of radicals in this hot nozzle is roughly 20 μs RONO→ΔRO+NO. We use the FTS to detect the IR absorption of the product NO (ν0=1876.1 cm−1) at resolutions as fine as 0.005 cm−1 FWHM. We observe the product NO from the pyrolysis of CH3CH2ONO to be rotationally cooled to roughly 50 K. The IR spectra indicate that the optical path length is about 3/4 cm and that the nitrites pyrolyze to produce approximately 1014 NO radicals cm−3 some 9 mm downstream from the nozzle. Our spectrometer is capable of detecting an absorption signal of 0.1% over a bandwidth of 100 cm−1 at 0.005 cm−1 resolution. Depending on the infrared cross section of the radical, this implies that we are able to monitor diatomic radical densities of roughly 5×1012 cm−3 (quantum state)−1. © 1995 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1145641
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  • 5
    Electronic Resource
    Electronic Resource
    Ribosomal RNA-Based Oligonucleotide Probes to Identify Marine Green Ultraphytoplankton (1996)
    Oxford, UK : Blackwell Publishing Ltd
    The @journal of eukaryotic microbiology 43 (1996), S. 0 
    Details
    ISSN: 1550-7408
    Source: Blackwell Publishing Journal Backfiles 1879-2005
    Topics: Biology
    Notes: Oligonucleotide probes based on small subunit 18S rRNA variable region sequences, were designed and used to discriminate groups of marine green ultraphytoplankton of similar size and morphology. Hybridization of probes was visualized using a combination of biotinylated oligonucleotides and fluorescein labeled avidin. Increased fluorescent signal was generated by building a complex of biotinylated probe, fluorescein labeled avidin and biotinylated anti-avidin. Cells of one phylogenetic group were easily differentiated from morphologically similar cells of a different phylogenetic group. Design of specific probes allowed identification of Mantoniella squamata, Micromonas pusilla, Pseudoscourfieldia marina and the micromonadophyte clone CCMP1194. This technique should be readily adaptable to open ocean samples and should greatly facilitate the description and quantification of ultraphytoplankton in the open ocean.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1111/j.1550-7408.1996.tb04486.x
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  • 6
    Electronic Resource
    Electronic Resource
    POVERTY POLICY IN LATIN AMERICA DURING THE 1980s (1997)
    Oxford, UK : Blackwell Publishing Ltd
    Review of income and wealth 43 (1997), S. 0 
    Details
    ISSN: 1475-4991
    Source: Blackwell Publishing Journal Backfiles 1879-2005
    Topics: Economics
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1111/j.1475-4991.1997.tb00204.x
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  • 7
    Electronic Resource
    Electronic Resource
    Domain structure in NiO biasing layers (abstract) : The 40th annual conference on magnetism and magnetic materials (1996)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 79 (1996), S. 5102-5102 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Fe3O4/NiO multilayers exhibit long-range antiferromagnetic order with the magnetite ferrimagnetic correlations confined to a single layer due to stacking faults of the spinel structure at the interfaces. We are studying the field dependence of the interlayer coupling and magnetic structure in a series of Fe3O4/NiO multilayers using neutron diffraction. Both NiO and Fe3O4 thin films were included in the measurements for comparison. In a single thick Fe3O4 film, intensity changes with magnetic field are consistent with the alignment of the net ferrimagnetic moment parallel to the applied field. In a single thick NiO film, we observe no intensity changes with magnetic field. For multilayers where the ratio of NiO to Fe3O4 is far from unity, the field dependence approximates that of the thick film of the majority constituent. However, for a Fe3O4 (68 A(ring))/NiO (34 A(ring)) multilayer the NiO antiferromagnetic intensity decreases with increasing field, applied parallel to a [110] axis in the film plane. This indicates a domain repopulation in the NiO, concomitant with the magnetization of the magnetite, where the antiferromagnetic modulation direction prefers the [111] axes that are closest to the applied field direction. A broadening of the NiO peak shows that the repopulated domains are smaller. We are pursuing a complete measurement of the domain populations by measuring a series of NiO antiferromagnetic diffraction peaks. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.361314
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  • 8
    Electronic Resource
    Electronic Resource
    Spatial distribution of Cu sputter ejected by very low energy ion bombardment (1997)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 82 (1997), S. 1868-1875 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Filling of submicron width trenches with Cu from a highly ionized plasma is sensitive to both the directionality of the depositing flux and reflection and resputtering at the film surface. The spatial distributions of Cu atoms sputtered by He+, Ar+, and Xe+ ions incident at 30°, 45° and 60° and over an ion energy range of ∼55–600 eV have been investigated. In all cases, the distribution is forward directed and cannot be described by a cosine distribution about the surface normal. Decreasing energy, increasing angles of incidence, and increasing ion mass yield more forward directed distributions. For ∼55 eV Ar+ incident at 60°, ∼85% of the resputtered flux is in the forward direction. From these distributions, in a 50% ionized physical vapor deposition system the depositing flux due to forward directed resputtering is estimated to be of the same order of magnitude as the neutral flux. © 1997 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.365991
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  • 9
    Electronic Resource
    Electronic Resource
    S and Si ion implantation in GaSb grown on GaAs (1999)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 86 (1999), S. 6068-6071 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Single and multiple energy S and Si ion implantations were performed at room temperature (RT) and 200 °C into GaSb epitaxial layers grown on semi-insulating GaAs substrates. The implanted material was annealed with a Si3N4 cap at 400–600 °C for 5 min. Secondary ion mass spectrometry measurements indicated the thermal stability of the Si and S implants even for 600 °C annealing. Appreciable donor electrical activations of Si and S were obtained only for 200 °C implantation for annealing temperatures ≥500 °C. For S implantation the calculated substitutional activation is ∼50%. Rutherford backscattering/channeling measurements indicated a lattice quality that is close to the virgin level for samples annealed at 600 °C. N-type conduction was not observed in GaSb bulk material implanted at either RT or 200 °C. © 1999 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.371655
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  • 10
    Electronic Resource
    Electronic Resource
    Electron spin resonance rare gas matrix studies of 12CO2−, 13CO2−, and C17O−2: Comparison with ab initio calculations (1996)
    College Park, Md. : American Institute of Physics (AIP)
    The Journal of Chemical Physics 105 (1996), S. 5672-5686 
    Details
    ISSN: 1089-7690
    Source: AIP Digital Archive
    Topics: Physics , Chemistry and Pharmacology
    Notes: The 12C16O2−, 13C16O2−, 12C17O2−, and 12C16,17O2− radical anions have been generated by four independent methods and isolated in neon and argon matrices for detailed ESR (electron spin resonance) investigations. Included with these experimental measurements for the various magnetic parameters of CO−2 are high level ab initio calculations (MR SD-CI and others) of the 13C and 17O hyperfine A tensors. Some of the calculations included the effects of a 42-atom neon cage on the electronic structure of CO−2. Previous ESR studies of CO−2 have been conducted in more perturbing environments, such as ionic crystals, where the close proximity of the counter cation can alter the anion's properties. A comparison of the earlier measurements in more interactive materials with these theoretical and rare gas matrix results reveals a significantly different distribution of the spin density. The neon magnetic parameters (MHz) for CO−2 are gx=2.0018, gy=1.9964, gz=2.0010; for 13C, Ax=320.4, Ay=296.1, Az=394.5; for 17O, Ax=−81.6, Ay=−74.9 and Az=−151.8. The argon results are similar to these neon values; isotropic spectra in argon were also observed at elevated temperatures that yielded giso and Aiso parameters consistent with the low temperature (4 K) anisotropic spectra. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.472456
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