Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
75 (1999), S. 2211-2213
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
A combination of energy-filtered electron diffraction, electron energy-loss spectroscopy, transmission electron microscopy, and x-ray diffraction are used to establish that oxygen impurities incorporated in tungsten films prepared by magnetron sputtering in the early stage of the deposition play a dominant role in the formation of an amorphous phase. Energy-filtered electron diffraction data collected from a range of amorphous films were Fourier transformed to a reduced density function (RDF) and matched with an amorphous model. The results show that better agreement with the experimental RDF is achieved if the amorphous model consists of a random continuous matrix of clusters with W3O-like symmetry. © 1999 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.124967
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