ISSN:
1089-7623
Quelle:
AIP Digital Archive
Thema:
Physik
,
Elektrotechnik, Elektronik, Nachrichtentechnik
Notizen:
A new type of impregnated-electrode-type liquid-metal ion source, which eliminated the heating problem in the previous source, has been developed with multiple tip and reservoirs (TAR's). In the present ion source, the TAR's are connected electrically in series by modifying the TAR holding system. In order to achieve uniform heating of the TAR's, the materials of the knife-edged electrodes, which introduce the heating current to the TAR's, were examined. Tantalum electrodes exhibited better results as compared with the conventional Mo electrodes. Both of the two TAR's could be heated up to 700 °C with a heating power of 200 W. The maximum indium ion current of 9.1 mA was obtained from the four-TAR source with 40 emission points. Since the present ion current was limited by the current capacity of the extraction power supply, an ion current of more than 10 mA will be expected with a larger power supply. The results indicated that an ion current approximately proportional to the number of the emission points was obtained. This kind of ion source could be used as a general ion source in materials science.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1063/1.1144956
