ISSN:
1662-9779
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Physics
Notes:
Developments of tetrahedral amorphous carbon (ta-C) films having low residualcompressive stress are essential to extend the applicability of the films. The annealing of the ta-Cfilms was known to be an effective way for the reduction the stress of the films. However, the effectsof annealing on the atomic structure of ta-C films have not been fully understood. The atomicstructure changes by the annealing were studied using molecular dynamics simulation. Thesimulation showed that the annealing caused an increase of the atomic volume of ta-C film, whichexplained the stress reduction partially. However, the tendency of the stress reduction was different tohigh and low stress films. The annealing substantially reduced the stresses of high stress filmscompared to those of low stress films. Atomic structure analysis showed that the reason for theasymmetric stress reduction resulted from the relaxation of highly distorted bonds that existed inas-deposited films
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/24/transtech_doi~10.4028%252Fwww.scientific.net%252FSSP.124-126.1685.pdf
