ISSN:
1013-9826
Quelle:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Thema:
Maschinenbau
Notizen:
A-C: H (Hydrogenated amorphous carbon) diamond like carbon(DLC) film is the lowstabilities of chemical and mechanical properties at high temperatures. Some researchers reported thatRaman spectra shown significant conversion of DLC films to nano-crystalline graphite on heating inambient air at temperatures above 300°C and conversion to nano-crystalline graphite was completedby 450~600°C In this study, DLC films(thickness : 1.5-m) were deposited on p-type (100) siliconfilms by using C6H6 and C6H14 plasma produced with a 13.6MHz RF source. To investigate themechanical stability of DLC films below 250°C, we thermally aged the films for different agingtemperatures (150°C, 200°C, 250°C) and times (0: virgin, 120, 240, 360 hours). By using indentationtest and Raman spectra analyses, it has been found that the H3/E2 decreases with increasing I(D)/I(G)ratio. Also we confirmed that sample-2(precursor gas: C6H14) had better mechanical characteristic andthermal stability than the sample-1(precursor gas: C6H6)
Materialart:
Digitale Medien
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/55/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.353-358.311.pdf
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