Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
57 (1990), S. 2537-2539
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Photonic integrated circuits with a virtually complete set of active and passive devices are fabricated in the GaAs/AlGaAs system by single-step chemically assisted ion beam etching. Using this straightforward processing technique, photonic integrated circuits consisting of etched facet ridge waveguide lasers coupled to passive waveguides, beamsplitters, etched turning mirrors, and photodetectors are demonstrated. The results presented point to the promise of this technique for the fabrication of future high-complexity photonic integrated circuits.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.103848
Permalink
|
Location |
Call Number |
Expected |
Availability |