ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
This paper has developed the bimodal USM a novel actuation pattern, which can actuatethe bimodal USM in nanometer magnitude with single actuation pattern instead of combinationcontrol of AC actuation pattern, pulse actuation pattern and DC actuation pattern. The novel actuationpattern utilizes a single chip micro-computer to produce a kind of wavelet actuation unit whichcontains several sine voltage waves with different amplitudes, each wavelet actuation unit is exertedon bimodal USM according to the instruction, by which the step control is obtained. Across the twoelectrodes of bimodal USM, the differential wavelet actuation voltages are applied to reduce themoving distance of each actuation step, thus the nanometer magnitude actuation sensitivity isachieved. The grating is used as position sensor and the subdivision formulae of mutual compensationfunctions are adopted to promote the real-time response. The experiment indicated that, with thenovel wavelet differential actuation pattern, the actuation characteristic of bimodal USM wasimproved, the micro-nanometer positioning control was easy to be implemented and the importantpositioning control parameters under every different actuation conditions could be obtained throughthe study in the process of actuation
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/57/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.381-382.57.pdf
Permalink