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  • 1
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Physics of Plasmas 7 (2000), S. 1421-1432 
    ISSN: 1089-7674
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A model of collisional processes of hydrocarbons in hydrogen plasmas has been developed to aid in computer modeling efforts relevant to plasma–surface interactions. It includes 16 molecules (CH up to CH4, C2H to C2H6, and C3H to C3H6) and four reaction types (electron impact ionization/dissociative ionization, electron impact dissociation, proton impact charge exchange, and dissociative recombination). Experimental reaction rates or cross sections have been compiled, and estimates have been made for cases where these are not available. The proton impact charge exchange reaction rates are calculated from a theoretical model using molecular polarizabilities. Dissociative recombination rates are described by the equation A/TB where parameter A is fit using polarizabilities and B is estimated from known reaction rates. The electron impact ionization and dissociation cross sections are fit to known graphs using four parameters: threshold energy, maximum value of the cross section, energy at the maximum, and a constant for the exponential decay as energy increases. The model has recently been used in an analysis of the Joint European Torus [P. H. Rebut, R. J. Bickerton, and B. E. Keen, Nucl. Fusion 25, 1011 (1985)] MARK II carbon inner divertor using the WBC Monte Carlo impurity transport code. The updated version of WBC, which includes the full set of hydrocarbon reactions, helps to explain an observed asymmetry in carbon deposition near the divertor. © 2000 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 72 (1992), S. 3064-3071 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A comparative study of the various model assumptions in Monte Carlo simulations of low-pressure sputter-atom transport is presented. The few-collision conditions and actual "racetrack'' magnetron geometry, typical of low-pressure magnetron sputtering, are emphasized. For the gas phase scattering problem, a comparison is made between hard sphere, Lennard–Jones 6-12, and Abrahamson Thomas–Fermi–Dirac [Phys. Rev. 178, 76 (1969)] interatomic potentials. The hard sphere potential results in both a significantly lower energy distribution and a more diffuse angular distribution for the depositing flux, as compared with the more realistic "softer'' potentials. Because energy-dependent cross sections are obtained when using the 6-12 and Abrahamson potentials, an "energy filtering'' effect is observed, i.e., high-energy particles arrive at the substrate preferentially to those at low energy. It is concluded that the hard sphere model will lead to serious errors in both the energy and angular distributions of the arrival flux, and that the 6-12 and Abrahamson potentials yield results that are similar to each other. For the nascent sputter distribution, fractal TRIM (transport of ions in matter) simulations are compared to the analytic Thompson distribution. While both distributions give nearly identical results for the angle-integrated fluxes, the fractal TRIM distribution shows a strong angular dependence of the energy distribution. The implications of this effect for finite geometry systems are discussed.
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 73 (1993), S. 2173-2179 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A displacement-current-based, Langmuir probe technique was developed to measure time-resolved and spatially dependent electron energy distribution functions (EEDF) in a 100 mTorr argon plasma. This diagnostic was designed to take consideration of the changes in displacement current collected at the probe due to changes in the probe tip sheath potential. The EEDFs collected displayed evidence of a time-dependent as well as spatially dependent electron beam component. The beam energy was seen to increase with the instantaneous plasma potential. The electron density was found to be 3.2±1.1×109, 1.0±1.5×1010, and 2.7±1.0×109 cm−3 at locations 0.6, 1.8, and 2.8 cm from the grounded electrode, respectively. Mean electron energies were also spatially dependent, measuring 8.7±0.8, 11.3±1.0, and 6.9±0.7 eV at locations 0.6, 1.8, and 2.8 cm from the grounded electrode, respectively.
    Type of Medium: Electronic Resource
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  • 4
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Physics of Plasmas 3 (1996), S. 4084-4094 
    ISSN: 1089-7674
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Monte Carlo neutral transport simulations of hydrogen velocities in the Tokamak Fusion Test Reactor (TFTR) [K. M. McGuire et al., Phys. Plasmas 2, 2176 (1995)] are compared with experiment using the Doppler-broadened Balmer-α spectral line profile. Good agreement is obtained under a range of conditions, validating the treatment of charge exchange, molecular dissociation, surface reflection, and sputtering in the neutral gas code DEGAS [D. Heifetz et al., J. Comput. Phys. 46, 309 (1982)]. A residual deficiency of 10–100 eV neutrals in most of the simulations indicates that further study of the energetics of H+2 dissociation for electron energies in excess of 100 eV is needed. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 5
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Physics of Plasmas 9 (2002), S. 738-740 
    ISSN: 1089-7674
    Source: AIP Digital Archive
    Topics: Physics
    Type of Medium: Electronic Resource
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  • 6
    Electronic Resource
    Electronic Resource
    New York, NY : American Institute of Physics (AIP)
    Physics of Fluids 5 (1993), S. 3140-3147 
    ISSN: 1089-7666
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Neutral atom elastic collisions are one of the dominant interactions in the edge of a high recycling diverted plasma. Starting from the quantum interatomic potentials, the scattering functions are derived for H on H+, H on H2, and He on H2 in the energy range of 0.1–1000 eV following classical scattering theory and an impact parameter formulation. Potentials for both the gerade and ungerade electronic wavefunctions were included. An algorithm for the addition of these reactions to the degas [J. Comput. Phys. 46, 309 (1982)] code is presented and used to simulate three test problems: (1) the transport of neutral atoms through a dilute edge plasma, (2) the penetration of neutral atoms into a dense plasma from a divertor plate, and (3) the transmittance of neutral atoms through a pump duct. In all three cases the inclusion of elastic scattering has a significant influence on the neutral atom density, temperature, and flux to the walls.
    Type of Medium: Electronic Resource
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  • 7
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 68 (1997), S. 4555-4560 
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: A diagnostic which combines a quartz crystal microbalance (QCM) and a gridded energy analyzer has been developed to measure the metal flux ionization fraction in a modified commercial dc magnetron sputtering device. The sensor is mounted on a linear motion feedthrough and embedded in a slot in the substrate plane to allow for measuring the uniformity in deposition and ionization throughout the plane of the wafer. Radio-frequency (rf) power is introduced through a coil to ionize the Al atoms. The metal flux ionization fraction at the QCM is determined by comparing the total deposition rate with and without a bias that screens out the ions, but that leaves the plasma undisturbed. By varying the voltage applied to the grids, the plasma potential is determined. At a pressure of 35 mTorr, a magnetron power of 2 kW, and a net rf power of 310±5 W, 78±5% ionization was found. © 1997 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 8
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 61 (1990), S. 3473-3478 
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: The design and operation of a neutral-hydrogen flux detection system is described. The central feature of the detector is an inductively driven electron cyclotron resonance heated (ECRH) discharge, which functions as the neutral-flux ionizer. The prominent features of the ionizer are its small (5×3×3 cm3) size and excitation of the ECRH mode using a 200-W, 30-MHz rf driver and static magnetic field level near 30 G. The ability of the system to ionize 910-eV neutral-hydrogen fluxes with subsequent detection in a high resolution energy analyzer is shown. The detection efficiency of the ionizer was found to be ≈6×10−4, based on scattering and charge exchange cross sections measured using a methane charge exchange cell. The ionizer has potential applications in angle-resolved reflected neutral-flux measurements and in beam-plasma interaction analysis.
    Type of Medium: Electronic Resource
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  • 9
    Publication Date: 2010-03-05
    Print ISSN: 0031-9007
    Electronic ISSN: 1079-7114
    Topics: Physics
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  • 10
    Publication Date: 2008-02-15
    Print ISSN: 0021-8979
    Electronic ISSN: 1089-7550
    Topics: Physics
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