ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
To retain the driving properties of metal-based micro optical scanner derived by aerosol deposition(AD) technique, CO2 laser irradiation was used to anneal the PZT films deposited onto thestainless-steel substrate. Stainless-steel mirror and frame of the scanner with the film annealed bylaser irradiation maintained their metallic luster. The scanner with the film annealed by laserirradiation at 600 °C for 1 min has a scanning angle over 30 degree that is comparable with thescanning angle of a similar scanner annealed by electric furnace at 600 °C for 10 min
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/57/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.388.195.pdf
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