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  • 1
    ISSN: 1432-1777
    Source: Springer Online Journal Archives 1860-2000
    Topics: Biology , Medicine
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    Weinheim : Wiley-Blackwell
    Zeitschrift für anorganische Chemie 587 (1990), S. 208-208 
    ISSN: 0044-2313
    Keywords: Chemistry ; Inorganic Chemistry
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    Weinheim : Wiley-Blackwell
    Zeitschrift für anorganische Chemie 591 (1990), S. 107-117 
    ISSN: 0044-2313
    Keywords: Chemistry ; Inorganic Chemistry
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Description / Table of Contents: Preparation and Crystal Structure of Ln3TiO4Cl5 (Ln = La-Nd) - the First Oxochlortitanates of Rare EarthThe compounds Ln3TiO4Cl5 have been prepared by reaction of LnCl3/LnOCl/TiO2 (1:2:1) (Ln = La-Nd) in evacuated silica ampoules. Single crystals of La3TiO4Cl5 were obtained by chemical transport reaction (T2 → T1; T2 = 1050°C, T1 = 950°C) using chlorine (p(Cl2; 298 K) = 1 atm) and sulfur as transport agents with La2TiO5 as starting material.La3TiO4Cl5 crystallizes in the orthorhombic space group Pnma (No. 62) with cell-dimensions a = 16.760(2) Å, b = 4.0991(6) Å, c = 14.634(2) Å, Z = 4. The structure was refined to give R = 4.76%, Rw = 2.47%. Main building units are TiO5 trigonal bipyramides and threefold capped trigonal prisms around La. The relationship to La2TaO4Cl3 will be discussed.
    Notes: Die neuen Verbindungen Ln3TiO4Cl5 wurden durch Umsetzung von Gemengen LnCl3/LnOCl/TiO2 (1:2:1) (Ln = La-Nd) in evakuierten Quarzglasampullen dargestellt (8d; 800°C). Einkristalle (mit Ln = La) wurden durch chemischen Transport (T2 → T1;T2 = 1050°C; T1 = 950°C) mit La2TiO5 als Startbodenkörper bei T2 sowie mit einer halogenierenden Transportmittelkombination aus Chlor (p)Cl2, 298K = 1 atm) und Schwefel (0,04 mmol Schwefel auf 1,36 mmol La2TiO5) erhalten.La3TiO4Cl5 kristallisiert orthorhombisch: RG Pnma (No. 62) mit den Gitterkonstanten a = 16,760(2) Å, b = 4,0991(6) Å, c = 14,634(2) Å, Z = 4. Die Struktur wurde bis zu R = 4,76%, Rw = 2,47% verfeinert. Die Koordination der Metallteilchen läßt sich durch trigonale Bipyramiden (TiO5 und dreifach bekappte trigonale Prismen (LaO2Cl4Cl3) beschreiben. Man erkennt ferner trigonale Baugruppen [La3Tio4]5+, die in eine Matrix aus Cl-Teilchen „eingebettet“ sind und somit eine Strukturverwandtschaft mit La2TaO4Cl3 zeigen.
    Additional Material: 7 Ill.
    Type of Medium: Electronic Resource
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  • 4
    Electronic Resource
    Electronic Resource
    Weinheim : Wiley-Blackwell
    Zeitschrift für anorganische Chemie 590 (1990), S. 238-238 
    ISSN: 0044-2313
    Keywords: Chemistry ; Inorganic Chemistry
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Type of Medium: Electronic Resource
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  • 5
    Electronic Resource
    Electronic Resource
    Weinheim : Wiley-Blackwell
    Zeitschrift für anorganische Chemie 592 (1991), S. 224-224 
    ISSN: 0044-2313
    Keywords: Chemistry ; Inorganic Chemistry
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Type of Medium: Electronic Resource
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  • 6
    Electronic Resource
    Electronic Resource
    Weinheim : Wiley-Blackwell
    Zeitschrift für anorganische Chemie 597 (1991), S. 87-96 
    ISSN: 0044-2313
    Keywords: Chemical transport ; rare earths ; oxochlorotitanates ; preparation ; single crystal structures ; Chemistry ; Inorganic Chemistry
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Description / Table of Contents: Preparation and Crystal Structure of Ln2Ti3O8Cl2 (Ln = Pr, Nd) - additional Oxochlorotitanates of Rare EarthsThe compounds Ln2Ti3O8Cl2 (Ln = Pr, Nd) have been prepared by reaction of LnOCl/TiO2 (2 : 3) in evacuated silica ampoules (6d, 800°C). Single crystals of Nd2Ti3O8Cl2 were obtained by chemical transport reaction (T2 → T1; T2 = 950°C, T1 = 850°C) using chlorine (p(Cl2, 298 K) = 1 atm) as transport agent with Nd3TiO4Cl5 as starting material.Nd2Ti3O8Cl2 crystallizes in the orthorhombic space group Pbcn (No. 60) with cell dimensions a = 14.6723(12) Å, b = 11.5586(8) Å, c = 5.0292(3) Å, Z = 4. The structure was refined to give R = 4.80%, RW = 4.48%. Main building units are TiO6-octahedra and Nd(Cl3O)O4 square antiprism.
    Notes: Die neuen Verbindungen Ln2Ti3O8Cl2 wurden durch Umsetzung von Gemengen LnOCl/TiO2 (2 : 3) (Ln = Pr, Nd) in evakuierten Quarzglasampullen dargestellt (6d, 800°C). Einkristalle (mit Ln = Nd) wurden durch chemischen Transport (T2 → T1; T2 = 950°C, T1 = 850°C) mit Nd3TiO4Cl5 als Startbodenkörper bei T2 sowie mit Chlor (p(Cl2, 298 K) = 1 atm) als Transportmittel erhalten.Nd2Ti3O8Cl2 kristallisiert orthorhombisch: RG Pbcn (No. 60) mit den Gitterkonstanten a = 14,6723(12) Å, b = 11,5586(8) Å, c = 5,0292(3) Å, Z = 4. Die Struktur wurde bis zu R = 4,80% bzw. RW = 4,48% verfeinert. Die Koordination der Metallteilchen läßt sich durch TiO6-Oktaeder und durch ein verzerrtes quadratisches Antiprisma Nd(Cl3O)O4 beschreiben. In der Struktur sind [Ti6O16]8--Baugruppen zu erkennen, die über Oktaederkanten entlang [001] verkettet sind.
    Additional Material: 4 Ill.
    Type of Medium: Electronic Resource
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  • 7
    Electronic Resource
    Electronic Resource
    Weinheim : Wiley-Blackwell
    Zeitschrift für anorganische Chemie 602 (1991), S. 119-128 
    ISSN: 0044-2313
    Keywords: Samarium oxochlorotitanate, SmTiO3Cl ; preparation ; crystal structure ; Chemistry ; Inorganic Chemistry
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Description / Table of Contents: Preparation and Crystal Structure of SmTiO3ClThe compound SmTiO3Cl has been prepared by reaction of SmOCl/TiO2 (1:1) (with an admixture of small amounts of SmCl3) in evacuated silica ampoules (3 d, 800°C). Single crystals of SmTiO3Cl were obtained by chemical transport reaction (T2 → T1; T2 = 1000°C, T1 = 900°C) using chlorine (p(Cl2, 298 K) = 1 atm) as transport agent with a sintered mixture SmOCl/TiO2 (2:3) (800°C, 5d, evacuated silica ampoule) as starting material.SmTiO3Cl crystallizes in the monoclinic space group C2/m (No. 12) with cell dimensions a = 9.716(3) Å, b = 3.942(2) Å, c = 10.100(4) Å, β = 106.63(3)° and Z = 4. The structure was refined to give R = 3.8%, Rw = 3.9%. Main building units are TiO32--layers (parallel to the (110) plain) which are connected by eightfold coordinated Sm-atoms. The relationship of this new structure type with Nd2Ta2O7Cl2 and ThTi2O6 is considered.
    Notes: Die neue Verbindung SmTiO3Cl wurde durch Umsetzung von Gemengen SmOCl/TiO2 (1:1) (unter Zusatz geringer Mengen SmCl3) in evakuierten Quarzglasampullen dargestellt (3d, 800°C). Einkristalle wurden durch chemischen Transport (T2 → T1; T2 = 1000°C, T1 = 900°C) mit einem getemperten (800°C, 5d; evakuierte Quarzglasampulle) Gemenge SmOCl/TiO2 (2:3) als Startbodenkörper bei T2 sowie mit Chlor (p(Cl2, 298K) = 1 atm) als Transportmittel erhalten.SmTiO3Cl kristallisiert monoklin: RG: C2/m (No. 12) mit den Gitterkonstanten a = 9.716(3) Å, b = 3.942(2) Å, c = 10.100(4) Å, β = 106.63(3)° und Z = 4. Die Struktur wurde bis zu R = 3.8% bzw. Rw = 3.9% verfeinert. Die Koordination der Metallteilchen läßt sich durch TiO6-Oktaeder und durch 8-fach koordinierte Sm-Atome beschrieben. Parallel zur (110)-Ebene sind Schichten mit der Zusammensetzung TiO32- zu erkennen. Die Strukturverwandtschaft zu Nd2Ta2O7Cl2 und ThTi2O6 wird aufgezeigt.
    Additional Material: 5 Ill.
    Type of Medium: Electronic Resource
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  • 8
    Publication Date: 2015-01-21
    Description: Dielectric etching plasma processes for modern interlevel dielectrics become more and more complex by the introduction of new ultra low-k dielectrics. One challenge is the minimization of sidewall damage, while etching ultra low-k porous SiCOH by fluorocarbon plasmas. The optimization of this process requires a deeper understanding of the concentration of the CF 2 radical, which acts as precursor in the polymerization of the etch sample surfaces. In an industrial dielectric etching plasma reactor, the CF 2 radical was measured in situ using a continuous wave quantum cascade laser (cw-QCL) around 1106.2 cm −1 . We measured Doppler-resolved ro-vibrational absorption lines and determined absolute densities using transitions in the ν 3 fundamental band of CF 2 with the aid of an improved simulation of the line strengths. We found that the CF 2 radical concentration during the etching plasma process directly correlates to the layer structure of the etched wafer. Hence, this correlation can serve as a diagnostic tool of dielectric etching plasma processes. Applying QCL based absorption spectroscopy opens up the way for advanced process monitoring and etching controlling in semiconductor manufacturing.
    Print ISSN: 0003-6951
    Electronic ISSN: 1077-3118
    Topics: Physics
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  • 9
    Publication Date: 1991-01-01
    Print ISSN: 2194-4946
    Electronic ISSN: 2196-7105
    Topics: Geosciences , Physics
    Published by De Gruyter
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  • 10
    Publication Date: 1991-01-01
    Print ISSN: 0044-2968
    Topics: Geosciences , Physics
    Published by De Gruyter
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