ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The change of structure of tetrahedral amorphous carbon (ta-C) films after nitrogen incorporation, particularly at a high concentration, was studied by near edge x-ray absorption fine structure (NEXAFS) spectroscopy and it was found to be very close to pyridine. The π* peak at the N K (nitrogen K) edge was decomposed into three components corresponding to different resonances. From a detailed analysis of N K edge by NEXAFS spectroscopy it was revealed that as the nitrogen concentration in the films increases, the σ*/π* intensity ratio decreases, indicating that there is an increase of the amount of C(Double Bond)N relative to the C–N bonds. By thermal annealing at different temperatures, up to 800 °C, the nitrogen concentration in the films is reduced. Intensity as well as the position of the π* peak at the C K edge changed with annealing temperature. At the same time, a decrease of the intensity of the π* peak at the N K edge and a very interesting change of the relative intensities of the three split components of this π* peak have been observed. The possible changes of structure of nitrogenated carbon films by annealing and thermal stability of the films have been thoroughly emphasized. © 2000 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1318389
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