Publication Date:
2014-02-08
Description:
Phase change from ferromagnetic to nonmagnetic phase by ion implantation was investigated for bit patterning. An antiferromagnetic L 1 0 FePt 0.64 Rh 0.36 film was implanted with Pt ions at 6.0 × 10 15 ions/cm 2 in order to control its magnetic properties. The film changed to a ferromagnetic one, with the (001) crystalline texture being normal to the film plane and a magnetocrystalline anisotropy of 2.3 × 10 7 erg/cm 3 in the perpendicular direction. Using this magnetic phase change, a planar dot pattern was fabricated. The average height between the dots and the spacing was 0.35 nm, and ferromagnetic dots 50 nm in diameter were observed.
Print ISSN:
0021-8979
Electronic ISSN:
1089-7550
Topics:
Physics