ISSN:
1662-0356
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Natural Sciences in General
,
Technology
Notes:
In order to fabricate two-dimensional micro actuators with shape memory alloy films, it isespecially important to evaluate the anisotropy of transformation strain that is caused by texture. Inthis paper, microstructures of sputter-deposited TiNi films are examined. The films of 1 μm inthickness are sputter-deposited on Si(001) substrates by RF magnetron multi-sputtering systemequipped with four separate confocal sources as well as with substrate heating. Pure Ti and Ni targetsof 50 mm in diameter are used for the sources. The films deposited at ambient temperature have beengenerally amorphous. However, we find that some films which are deposited at 773K of substratetemperature are crystalline, when we appropriately choose sputtering parameters such as sourcevoltage and the distance between a target and the substrate. X-ray powder diffraction and pole figuremeasurements reveal that these films are oriented with {110}B2 parallel or inclined at 45 degree tothe substrate. Furthermore, we also find that crystallized film is deposited even at 673K of substratetemperature by applying pulse bias voltage to the substrate
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/42/transtech_doi~10.4028%252Fwww.scientific.net%252FAST.59.30.pdf
