ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
This paper presents a valve-less micropump which is actuated by a piezoelectric ceramic chip.We employ a microelectromechanical system process for the silicon substrate and anodic bonding forassembly of the Pyrex glass and silicon wafer. The reciprocating type micropump contains twonozzle/diffuser elements and a silicon membrane with an embedded piezoelectric ceramic actuator
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/56/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.368-372.215.pdf