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Production of atomic nitrogen ion beams (1990)

Walther, S. R. ; Leung, K. N. ; Kunkel, W. B.

[S.l.] : American Institute of Physics (AIP)

Review of Scientific Instruments 61 (1990), S. 315-317

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ISSN: 1089-7623

Source: AIP Digital Archive

Topics: Physics , Electrical Engineering, Measurement and Control Technology

Notes: A small multicusp ion source has been used to generate beams of nitrogen ions. To achieve a high percentage of N+ ions, the source was equipped with a magnetic filter and operated with a high N2 gas density. A nearly pure atomic nitrogen ion (N+) beam (98.5% N+, 1.5% N2+), suitable for implantation purposes, was produced. The operating characteristics of this source, including species mix, are presented.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.1141280

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