AIP Digital Archive
Electrical Engineering, Measurement and Control Technology
This paper describes a new method of exciting slow wave structures (SWS) for obtaining high-density electron cyclotron resonance plasmas. The electric field component corresponding to the slow wave mode (SWM) of SWS is excited by an E-plane horn antenna. The special features of the microwave transmission line are the stable tuning for a given antenna and no requirement for water cooling on any of the components. Two types of SWS, a helical coil and a slotted line antenna, are studied, and the experiments are carried out in nitrogen and argon. The plasma producing capability is examined for these systems in the region wce,wpe(approximately-greater-than)wrf, where wce, wpe, and wrf correspond to electron cyclotron, plasma, and microwave frequencies, respectively. A high-density, large-diameter plasma (n0∼5×1011 cm−3; diameter ∼8.0 cm) could be obtained and the plasma could be maintained in the region 1≤wce/wrf≤2.
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