Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Review of Scientific Instruments
65 (1994), S. 3113-3118
ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
The presence of background gas in the discharge chamber of the metal vapor vacuum arc source influences the extracted beam. We have observed a strong influence of the background gas pressure in the arc region on the total extracted beam current and on the charge state distribution of the metallic ions. Different gases have been investigated together with different cathode materials. Up to 90% of the total beam current can be gaseous ions, depending on the arc and gas injection conditions.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1144764
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