ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
An ECR ion source was excited by microwaves (2.45 GHz). The discharge chamber diameter of the ECR ion source into which microwaves were introduced by a waveguide and a vacuum window, is smaller than the cut off for TE or TM modes. The magnetic structure is built with an NdFeB permanent magnet where the magnetization M is perpendicular to the source axis. This cusp structure enables us to produce an N+ ion current of 1.1 mA (ion current density of 16 mA/cm2) at an extraction voltage of 8 kV with an aperture of 3 mm diameter by a two grid system; ion beam diameter is 0.2 mm by focusing. This ion source is used for bio-organic mutation.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1144994